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Kovalchuk N., Shestovsky D., Solovjov J., Pilipenko V. The Influence of Silicon Oxide Nitridation by Pulsed Photon Processing on the Electrical Parameters of the Electronic Component Base of CMOS Integrated Circuits. Doklady BGUIR. 2026;24(4):16-21. (In Russ.) https://doi.org/10.35596/1729-7648-2026-24-4-16-21

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ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)