For citations:

Logunov K.T. The Influence of Cleaning Parameters in High-Density Argon Plasma on the Surface Morphology of Glass Substrates and the Characteristics of the Emission Spectrum. Doklady BGUIR. 2025;23(6):24-30. (In Russ.) https://doi.org/10.35596/1729-7648-2025-23-6-24-30