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For citations:

Kupo A.N. Laser-Activated Photochemical Processes of Formation of Thin-Film Systems of Microelectronics. Doklady BGUIR. 2025;23(5):20-26. (In Russ.) https://doi.org/10.35596/1729-7648-2025-23-5-20-26

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ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)

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