Лавинные светодиоды на основе наноструктурированного кремния для СВЧ-диапазона частот

Для развития кремниевой фотоники необходима разработка эффективного источника светового сигнала. В качестве такого источника могут использоваться лавинные кремниевые светодиоды. В статье рассмотрены лавинные светодиоды на основе наноструктурированного кремния. Измерение емкости светодиодных структур показало, что при уменьшении площади светодиодов до 100 мкм² суммарная емкость светодиода и металлической разводки уменьшается до сотен фемтофарад, что обеспечивает лавинным светодиодам функционирование в СВЧ-диапазоне. Показано, что увеличение быстродействия лавинных светодиодов ограничено резистивно-емкостными задержками, зависящими от барьерной емкости диодных структур. Рассмотрены способы увеличения быстродействия лавинных светодиодов как в сверхвысоком частотном диапазоне, так и в гипервысоком диапазоне частот. В частности, при уменьшении рабочей площади светодиодов до 1 мкм² прогнозируется их функционирование во всем гигагерцовом диапазоне частот.

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