For citations:
Doan H.T., Golosov D.A., Zhang J., Zavadski S.M., Melnikov S.N., Nguyen T.D. Model of Reactive Magnetron Sputtering of a Two-Component Composite Target. Doklady BGUIR. 2023;21(3):17-25. (In Russ.) https://doi.org/10.35596/1729-7648-2023-21-3-17-25