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Doklady BGUIR

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Doan H.T., Golosov D.A., Zhang J., Zavadski S.M., Melnikov S.N., Nguyen T.D. Model of Reactive Magnetron Sputtering of a Two-Component Composite Target. Doklady BGUIR. 2023;21(3):17-25. (In Russ.) https://doi.org/10.35596/1729-7648-2023-21-3-17-25

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ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)