Passivation of a Conductive System of Integrated Circuits with a Layer of Aluminum Nitride

V. V. Emelyanov

Doklady BGUIR
Doklady BGUIR

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ISSN 2708-0382 (Online)

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Emelyanov V.V. Passivation of a Conductive System of Integrated Circuits with a Layer of Aluminum Nitride. Doklady BGUIR. 2023;21(3):12-16. (In Russ.) https://doi.org/10.35596/1729-7648-2023-21-3-12-16

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ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)

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