Through-silicon-via formation of 3D electronic modules by laser radiation | Lanin | Doklady BGUIR

Doklady BGUIR
Doklady BGUIR

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ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)

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Lanin V.L., Pham V.T., Lappo A.I. Through-silicon-via formation of 3D electronic modules by laser radiation. Doklady BGUIR. 2021;19(3):58-65. (In Russ.) https://doi.org/10.35596/1729-7648-2021-19-3-58-65

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ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)

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About the Authors

V. L. Lanin
Belarusian State University of Informatics and Radioelectronics
Belarus

Lanin Vladimir Leonidovich, D.Sc., Professor, Professor at the Electronic Engineering and Technology Department

220013, Minsk, P. Brovka str., 6

tel. +375-29-757-28-23

V. T Pham
Belarusian State University of Informatics and Radioelectronics
Belarus

Undergraduate student at the Electronic Engineering and Technology Department

220013, Minsk, P. Brovka str., 6

tel. +375-29-757-28-23

A. I. Lappo
Belarusian State University of Informatics and Radioelectronics
Belarus

Postgraduate student at the Electronic Engineering

220013, Minsk, P. Brovka str., 6

tel. +375-29-757-28-23

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