Simulation of silicon wafers heating during rapid thermal processing using “UBTO 1801” unit | Solovjov | Doklady BGUIR

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ISSN 2708-0382 (Online)

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Solovjov J.A., Pilipenko V.A., Yakovlev V.P. Simulation of silicon wafers heating during rapid thermal processing using “UBTO 1801” unit. Doklady BGUIR. 2020;18(7):79-86. (In Russ.) https://doi.org/10.35596/1729-7648-2020-18-7-79-86

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ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)

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About the Authors

J. A. Solovjov
JSC “INTEGRAL” – “NTEGRAL” holding managing company
Russian Federation

Solovjov Jaroslav Aleksandrovich, PhD, Associate Professor, Deputy director of “Transistor” Branch

220108, Minsk, Korzhenevskogo str., 16

V. A. Pilipenko
JSC “INTEGRAL” – “NTEGRAL” holding managing company
Russian Federation

D.Sci, Рrofessor, Corr. mem. of the National Academy of Sciences of Belarus, Deputy director of Science Development of State Center “Belmicroanalysis”

Minsk

V. P. Yakovlev
LLC “Prospective innovation technologies”
Russian Federation

PhD, Director

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