For citations:
Solodukha V.A., Pilipenko V.A., Gorushko V.A. Rapid thermal treatment modes of the Рt-Si system for formation of platinum silicide. Doklady BGUIR. 2018;(8):88-92. (In Russ.)
Solodukha V.A., Pilipenko V.A., Gorushko V.A. Rapid thermal treatment modes of the Рt-Si system for formation of platinum silicide. Doklady BGUIR. 2018;(8):88-92. (In Russ.)