Generalized method of computer-aided design of technological processes for MEMS accelerometers manufacturing

I. Sh. Nevliudov; K. L. Khrustalev; V. O. Bortnikova

Doklady BGUIR
Doklady BGUIR

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ISSN 2708-0382 (Online)

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Nevliudov I.Sh., Khrustalev K.L., Bortnikova V.O. Generalized method of computer-aided design of technological processes for MEMS accelerometers manufacturing. Doklady BGUIR. 2018;(3):94-99. (In Russ.)

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ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)

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