Effect of Pulsed Photon Processing in Nitrogen Ambient on Optical and Electrophysical Characteristics of Silicon Dioxide Layers of Its Boundaries with Silicon

N. S. Kovalchuk; V. A. Pilipenko; Ja. A. Solovjov

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Kovalchuk N.S., Pilipenko V.A., Solovjov J.A. Effect of Pulsed Photon Processing in Nitrogen Ambient on Optical and Electrophysical Characteristics of Silicon Dioxide Layers of Its Boundaries with Silicon. Doklady BGUIR. 2025;23(3):5-11. (In Russ.) https://doi.org/10.35596/1729-7648-2025-23-3-5-11

This work is licensed under a Creative Commons Attribution 4.0 License.

ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)

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