Formation of Films of Alloys of Cr–Ni, Cr–Ni–Si and Fe–Ni Systems by Sublimation and Evaporation Methods for Electronic Products
https://doi.org/10.35596/1729-7648-2023-21-5-5-12
Abstract
The processes of formation of films of alloys of the Cr–Ni, Cr–Ni–Si and Fe–Ni systems with a stab le elemental composition by evaporation methods are considered. It is shown that due to the large difference in the melting temperatures of Ni and Cr, nichrome films are obtained by sublimation. The design of the evaporator is proposed, which makes it possible to stabilize the composition of the films. Calculations of azeotropic compositions of alloys of the Cr–Ni–Si system have been carried out. The position of the isobars of the total pressure of iron and nickel on the state diagram was determined during evaporation in vacuum. The azeotropic composition of the alloy of the Fe–Ni system was calculated and experimentally verified.
About the Authors
V. A. Zelenin
Physical-Technical Institute of the National Academy of Sciences of Belarus
Belarus
Belarus
Victor A. Zelenin, Dr. of Sci. (Tech.), Professor, Principal Researcher
Minsk
E. O. Narushko
Joint-Stock Company “Peleng”
Belarus
Belarus
Narushko Elena Olegovna, Сand. of Sci., Process Engineer
220114, Minsk, Academician Vysotsky St., 3–26
Tel.: +375 29 345-86-72
A. D. Gladinov
Joint-Stock Company “Optron” of the National Academy of Sciences of Belarus
Belarus
Belarus
Anton D. Gladinov, Junior Scientific Researcher
Minsk
References
1. Zelenin V. A. (2021) Silicide Alloys of Azeotropic and Eutectic Compositions for Cathodes and Targets of Vacuum Arc and Magnetron Installations. Modern Methods and Technologies for the Creation and Processing of Materials: a Collection of Scientific Papers. In 2 Books. Book 1. New Technologies and Materials. Minsk, Physical-Technical Institute of the National Academy of Sciences of Belarus. 208–223 (in Russian).
2. Volochko A. T., Zelenin V. A., Narushko E. O. (2016) Multilayer Coatings on Computer Elements as a Means of Technical Protection of Information. Problems of Information Security, II International Scientific and Practical Conference, Simferopol, Febr. 25–27, 2016. Simferopol. 16–19 (in Russian).
3. Zelenin V. A., Narushko E. O., Gladinov A. D. (2023) Obtaining Multicomponent Coatings of a Stable Composition for Electromagnetic Radiation Screens. Doklady BGUIR. 21 (4), 19–27. http://dx.doi.org/10.35596/1729-7648-2023-21-4-19-27 (in Russian).
4. Elinson M. I., Smolko G. G. (ed.) (1977) Thin Film Technology: a Handbook. In 2 Vol. Moscow, Soviet Radio Publ. Vol. 1. 9–174 (in Russian).
5. Elinson M. I., Smolko G. G. (ed.) (1977) Thin Film Technology: a Handbook. In 2 Vol. Moscow, Soviet Radio Publ. Vol. 2. 578–622 (in Russian).
6. Gursky L. I., Zhebin A. P., Zelenin V. A. (2013) Evaporator for Applying Nichrome Films. Certificate of Authorship. 1120706 USSR. Claimed 21.04.1982. Published on 27.09.2013. Bulletin No 27.
7. Gurskii L. I., Zelenin V. A., Zhebin A. P. et al. (1987) Structure, Topology and Properties of Film Resistors. Minsk, Nauka i Technika Publ. 264 (in Russian).
8. Kulikov I. S. (1969) Thermal Dissociation of Compounds. Moscow, Metallurgiya Publ. 574 (in Russian).
9. Zelenin V. A. (2022) Highly Stable Elements and Structures for Nanoelectronics Products. Minsk, Belaruskaya Navuka Publ. 290 (in Russian).
10. Gladinov A. D. (2020) Calculation of Melting Temperatures for Co–Cr–Si and Co–Cr–La–Si Resistive Alloy Systems. Casting and Metallurgy – 2020: Collection of Scientific Works of the III International Scientific and Practical Internet-Conference for Students and Master’s Students, Minsk, Nov. 18–19, 2020. Minsk, Belarusian National Technical University Publ. 85–87 (in Russian).
11. Zelenin V. A., Markov G. V., Narushko E. O. (2014) Screening Properties of Coatings of the Ni–Fe System. Modern Methods and Technologies for the Creation and Processing of Materials: Collection of Scientific Works. Minsk, Book 1: Materials Science. 271–280.
Review
For citations:
Zelenin V.A., Narushko E.O., Gladinov A.D. Formation of Films of Alloys of Cr–Ni, Cr–Ni–Si and Fe–Ni Systems by Sublimation and Evaporation Methods for Electronic Products. Doklady BGUIR. 2023;21(5):5-12. (In Russ.) https://doi.org/10.35596/1729-7648-2023-21-5-5-12
Views: 379
Email this article 