Formation of Diamond-Like Carbon Coatings by Chemical Deposition in High Density Plasma
https://doi.org/10.35596/1729-7648-2023-21-4-33-39
Abstract
A developed technological reactor for the formation of a diamond-like carbon coating on substrates up to 200 mm in diameter by chemical vapor deposition in high-density inductively coupled plasma at an operating pressure below 5 Pa is described. The results of experimental studies on obtaining a diamond-like carbon coating in the developed reactor are presented. The dependences of the rate of deposition of a diamond-like carbon coating on the power of the RF discharge, the operating pressure, and the consumption of the film-forming gaseous reagent have been established. Also, for the developed technological reactor, the modes for obtaining diamond-like carbon coatings with the best mechanical properties were established with the following process parameters: RF power 600–900 W, precursor gas flow rate 15–50 cm3/min, the ratio of plasma-forming gas volumes to film-forming gas volume 3:1 at a residual pressure in the working chamber of not more than 4 Pa. It has been shown by Raman spectroscopy that the coatings obtained under efficient conditions contain a significant amount of a diamond-like phase.
About the Authors
N. V. Leonovich
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Leonovich Nikita Victorovich - Junior Researcher at the Center for Interdisciplinary Research of R&D Department.
220013, Minsk, Р. Brovki St., 6. Tel.: +375 17 293-23-04
P. D. Tovt
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Pavel D. Tovt - Electronics Engineer at the Center for Interdisciplinary Research of R&D Department.
Minsk
D. A. Kotov
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Dmitry A. Kotov - Cand. of Sci., Associate Professor at the Department of Micro- and Nanoelectronics, Deputy Chief of the Center for Interdisciplinary Research of R&D Department.
Minsk
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Review
For citations:
Leonovich N.V., Tovt P.D., Kotov D.A. Formation of Diamond-Like Carbon Coatings by Chemical Deposition in High Density Plasma. Doklady BGUIR. 2023;21(4):33-39. (In Russ.) https://doi.org/10.35596/1729-7648-2023-21-4-33-39
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