For citations:
Pilipenko V.A., Solodukha V.A., Kovalchuk N.S., Solovjov J.A., Shestovski D.V., Zhyhulin D.V. Thermal Load Influence during the Formation of Al-Al Contacts on the Electrical Parameters of the Integrated Circuits with Aluminum-Polysilicon Contacts. Doklady BGUIR. 2022;20(7):20-27. (In Russ.) https://doi.org/10.35596/1729-7648-2022-20-7-20-27
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