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For citations:

Saladukha V.A., Pilipenko V.A., Gorushko V.A. Influence of the rapid thermal treatment of the gate dielectric on the parameters of integrated circuits of time devices. Doklady BGUIR. 2020;18(3):20-27. (In Russ.) https://doi.org/10.35596/1729-7648-2020-18-3-20-27

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ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)

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