Preview

Доклады БГУИР

Расширенный поиск

APPLICATIONS OF UV-LIGA AND GRAYSCALE LITHOGRAPHY FOR DISPLAY TECHNOLOGIES

https://doi.org/10.35596/1729-7648-2019-125-7-81-87

Полный текст:

Аннотация

In the article MEMS technologies for display production and application presented. UV-LIGA and greyscale lithography based on SU-8 resist approaches were shown. Methods, technologies and structures of heterogeneous materials with soft magnetic properties, pros and cons are discussed. Unique specific parameters of soft magnetic composite material were achieved: magnetic induction of saturation – 2,1 Т, working frequency range – up to 1 MHz, permeability – up to 3000, total loss – 8 W/kg, Curie temperature – above 800 ºС. Electroplating allows deposition of soft magnetic alloys on the conductive substrate. Metals like Fe, Ni, Co with additives like B, P were used to get the best soft magnetic properties. Special codeposition process was developed to allow insertion of soft magnetic composite powder filaments into soft magnetic matrix formed during. It allows developing magnetic micromotors for display production. Simulation of the hybrid step micromotors was carried out in Ansys Maxwell 19. It was demonstrated that it is possible to get 10 mN m tourqe under 25 μm rotor-stator air gap. Only presented microtechnologies can provide such accuracy of the mciromotors elements. As for greyscale photolithography, special grey mask were developed and it was demonstrated the possibility to produce controllable real 3D relief on the SU-8 photoresist. Thus, microtechnologies should be integrated into display technology to provide cost effective production and advanced properties of final products.

Об авторах

I. V. Timoshkov
Belarus State University of Informatics and Radioelectronics
Россия

Timoshkov Ioury Viktorovich, Leading Researcher

220013, Republic of Belarus, Minsk, P. Brovka st., 6

tel. +375-29-637-43-48



A. V. Khanko
Belarusian State Academy of Communications
Беларусь
Graduate student


V. I. Kurmashev
Belarusian State Academy of Communications
Беларусь
D. Sci., professor, Leading Researcher


D. V. Grapov
Belarus State University of Informatics and Radioelectronics
Беларусь

Researcher

220013, Republic of Belarus, Minsk, P. Brovka st., 6

tel. +375-29-637-43-48



A. A. Kastevich
Belarus State University of Informatics and Radioelectronics
Беларусь

Master student

220013, Republic of Belarus, Minsk, P. Brovka st., 6

tel. +375-29-637-43-48



G. A. Govor
Scientific Practical Materials Research Center of National Academy of Science
Беларусь
Leading Researcher


A. K. Vetcher
Scientific Practical Materials Research Center of National Academy of Science
Беларусь
Researcher


Для цитирования:


Timoshkov I.V., Khanko A.V., Kurmashev V.I., Grapov D.V., Kastevich A.A., Govor G.A., Vetcher A.K. APPLICATIONS OF UV-LIGA AND GRAYSCALE LITHOGRAPHY FOR DISPLAY TECHNOLOGIES. Доклады БГУИР. 2019;(7 (125)):81-87. https://doi.org/10.35596/1729-7648-2019-125-7-81-87

For citation:


Timoshkov I.V., Khanko A.V., Kurmashev V.I., Grapov D.V., Kastevich A.A., Govor G.A., Vetcher A.K. APPLICATIONS OF UV-LIGA AND GRAYSCALE LITHOGRAPHY FOR DISPLAY TECHNOLOGIES. Doklady BGUIR. 2019;(7 (125)):81-87. https://doi.org/10.35596/1729-7648-2019-125-7-81-87

Просмотров: 94


Creative Commons License
Контент доступен под лицензией Creative Commons Attribution 4.0 License.


ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)