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<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">bsuir</journal-id><journal-title-group><journal-title xml:lang="ru">Доклады БГУИР</journal-title><trans-title-group xml:lang="en"><trans-title>Doklady BGUIR</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">1729-7648</issn><issn pub-type="epub">2708-0382</issn><publisher><publisher-name>БГУИР</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.35596/1729-7648-2019-125-7-81-87</article-id><article-id custom-type="elpub" pub-id-type="custom">bsuir-2118</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>СЕКЦИЯ 4. МАТЕРИАЛЫ И ТЕХНОЛОГИИ ПРОИЗВОДСТВА ДИСПЛЕЕВ</subject></subj-group></article-categories><title-group><article-title>APPLICATIONS OF UV-LIGA AND GRAYSCALE LITHOGRAPHY FOR DISPLAY TECHNOLOGIES</article-title><trans-title-group xml:lang="en"><trans-title>APPLICATIONS OF UV-LIGA AND GRAYSCALE LITHOGRAPHY FOR DISPLAY TECHNOLOGIES</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Timoshkov</surname><given-names>I. V.</given-names></name><name name-style="western" xml:lang="en"><surname>Timoshkov</surname><given-names>I. V.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Timoshkov Ioury Viktorovich, Leading Researcher</p><p>220013, Republic of Belarus, Minsk, P. Brovka st., 6</p><p>tel. +375-29-637-43-48</p></bio><bio xml:lang="en"><p>Timoshkov Ioury Viktorovich, Leading Researcher</p><p>220013, Republic of Belarus, Minsk, P. Brovka st., 6</p><p>tel. +375-29-637-43-48</p></bio><email xlink:type="simple">timoshkov@bsuir.by</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Khanko</surname><given-names>A. V.</given-names></name><name name-style="western" xml:lang="en"><surname>Khanko</surname><given-names>A. V.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Graduate student</p></bio><bio xml:lang="en"><p>Graduate student</p></bio><xref ref-type="aff" rid="aff-2"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Kurmashev</surname><given-names>V. I.</given-names></name><name name-style="western" xml:lang="en"><surname>Kurmashev</surname><given-names>V. I.</given-names></name></name-alternatives><bio xml:lang="ru"><p>D. Sci., professor, Leading Researcher</p></bio><bio xml:lang="en"><p>D. Sci., professor, Leading Researcher</p></bio><xref ref-type="aff" rid="aff-2"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Grapov</surname><given-names>D. V.</given-names></name><name name-style="western" xml:lang="en"><surname>Grapov</surname><given-names>D. V.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Researcher</p><p>220013, Republic of Belarus, Minsk, P. Brovka st., 6</p><p>tel. +375-29-637-43-48</p></bio><bio xml:lang="en"><p>Researcher</p><p>220013, Republic of Belarus, Minsk, P. Brovka st., 6</p><p>tel. +375-29-637-43-48</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Kastevich</surname><given-names>A. A.</given-names></name><name name-style="western" xml:lang="en"><surname>Kastevich</surname><given-names>A. A.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Master student</p><p>220013, Republic of Belarus, Minsk, P. Brovka st., 6</p><p>tel. +375-29-637-43-48</p></bio><bio xml:lang="en"><p>Master student</p><p>220013, Republic of Belarus, Minsk, P. Brovka st., 6</p><p>tel. +375-29-637-43-48</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Govor</surname><given-names>G. A.</given-names></name><name name-style="western" xml:lang="en"><surname>Govor</surname><given-names>G. A.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Leading Researcher</p></bio><bio xml:lang="en"><p>Leading Researcher</p></bio><xref ref-type="aff" rid="aff-3"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Vetcher</surname><given-names>A. K.</given-names></name><name name-style="western" xml:lang="en"><surname>Vetcher</surname><given-names>A. K.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Researcher</p></bio><bio xml:lang="en"><p>Researcher</p></bio><xref ref-type="aff" rid="aff-3"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru"><institution>Belarus State University of Informatics and Radioelectronics</institution></aff><aff xml:lang="en"><institution>Belarus State University of Informatics and Radioelectronics</institution></aff></aff-alternatives><aff-alternatives id="aff-2"><aff xml:lang="ru"><institution>Belarusian State Academy of Communications</institution></aff><aff xml:lang="en"><institution>Belarusian State Academy of Communications</institution></aff></aff-alternatives><aff-alternatives id="aff-3"><aff xml:lang="ru"><institution>Scientific Practical Materials Research Center of National Academy of Science</institution></aff><aff xml:lang="en"><institution>Scientific Practical Materials Research Center of National Academy of Science</institution></aff></aff-alternatives><pub-date pub-type="collection"><year>2019</year></pub-date><pub-date pub-type="epub"><day>06</day><month>12</month><year>2019</year></pub-date><volume>0</volume><issue>7 (125)</issue><issue-title>Спецвыпуск</issue-title><fpage>81</fpage><lpage>87</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Timoshkov I.V., Khanko A.V., Kurmashev V.I., Grapov D.V., Kastevich A.A., Govor G.A., Vetcher A.K., 2019</copyright-statement><copyright-year>2019</copyright-year><copyright-holder xml:lang="ru">Timoshkov I.V., Khanko A.V., Kurmashev V.I., Grapov D.V., Kastevich A.A., Govor G.A., Vetcher A.K.</copyright-holder><copyright-holder xml:lang="en">Timoshkov I.V., Khanko A.V., Kurmashev V.I., Grapov D.V., Kastevich A.A., Govor G.A., Vetcher A.K.</copyright-holder><license xml:lang="ru" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>Данная работа распространяется под лицензией Creative Commons Attribution 4.0.</license-p></license><license xml:lang="en" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://doklady.bsuir.by/jour/article/view/2118">https://doklady.bsuir.by/jour/article/view/2118</self-uri><abstract><p>In the article MEMS technologies for display production and application presented. UV-LIGA and greyscale lithography based on SU-8 resist approaches were shown. Methods, technologies and structures of heterogeneous materials with soft magnetic properties, pros and cons are discussed. Unique specific parameters of soft magnetic composite material were achieved: magnetic induction of saturation – 2,1 Т, working frequency range – up to 1 MHz, permeability – up to 3000, total loss – 8 W/kg, Curie temperature – above 800 ºС. Electroplating allows deposition of soft magnetic alloys on the conductive substrate. Metals like Fe, Ni, Co with additives like B, P were used to get the best soft magnetic properties. Special codeposition process was developed to allow insertion of soft magnetic composite powder filaments into soft magnetic matrix formed during. It allows developing magnetic micromotors for display production. Simulation of the hybrid step micromotors was carried out in Ansys Maxwell 19. It was demonstrated that it is possible to get 10 mN m tourqe under 25 μm rotor-stator air gap. Only presented microtechnologies can provide such accuracy of the mciromotors elements. As for greyscale photolithography, special grey mask were developed and it was demonstrated the possibility to produce controllable real 3D relief on the SU-8 photoresist. Thus, microtechnologies should be integrated into display technology to provide cost effective production and advanced properties of final products.</p></abstract><trans-abstract xml:lang="en"><p>In the article MEMS technologies for display production and application presented. UV-LIGA and greyscale lithography based on SU-8 resist approaches were shown. Methods, technologies and structures of heterogeneous materials with soft magnetic properties, pros and cons are discussed. Unique specific parameters of soft magnetic composite material were achieved: magnetic induction of saturation – 2,1 Т, working frequency range – up to 1 MHz, permeability – up to 3000, total loss – 8 W/kg, Curie temperature – above 800 ºС. Electroplating allows deposition of soft magnetic alloys on the conductive substrate. Metals like Fe, Ni, Co with additives like B, P were used to get the best soft magnetic properties. Special codeposition process was developed to allow insertion of soft magnetic composite powder filaments into soft magnetic matrix formed during. It allows developing magnetic micromotors for display production. Simulation of the hybrid step micromotors was carried out in Ansys Maxwell 19. It was demonstrated that it is possible to get 10 mN m tourqe under 25 μm rotor-stator air gap. Only presented microtechnologies can provide such accuracy of the mciromotors elements. As for greyscale photolithography, special grey mask were developed and it was demonstrated the possibility to produce controllable real 3D relief on the SU-8 photoresist. Thus, microtechnologies should be integrated into display technology to provide cost effective production and advanced properties of final products.</p></trans-abstract><kwd-group xml:lang="ru"><kwd>microelectronics</kwd><kwd>MEMS</kwd><kwd>UV-LIGA</kwd><kwd>grayscale lithography</kwd><kwd>photolithography</kwd><kwd>display production</kwd></kwd-group><kwd-group xml:lang="en"><kwd>microelectronics</kwd><kwd>MEMS</kwd><kwd>UV-LIGA</kwd><kwd>grayscale lithography</kwd><kwd>photolithography</kwd><kwd>display production</kwd></kwd-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Mahmood, Md Sohel, Zeynep Celik-Butler, and Donald P. Butler. 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