LED ULTRAVIOLET EXPOSURE UNIT WITH ADJUSTABLE EXPOSURE TIME
https://doi.org/10.35596/1729-7648-2019-125-7-46-50
Abstract
The possibilities of improving the quality of the topological pattern in the exposure of thick-film photoresists due to uniform irradiation with ultraviolet light-emitting diodes are investigated. The results of an experimental study of the developed LED ultraviolet photolithographic irradiator with a controlled exposure time are presented.
About the Authors
A. E. Cheliapin
Center of LED and Optoelectronic Technologies of National Academy of Sciences of Belarus
Belarus
Belarus
Chelyapin Alexey Evgenievich, PG student, researcher
220090, Republic of Belarus, Minsk, Logoisk tr., 20
tel.+375-29-673-65-92
P. S. Begunov
Center of LED and Optoelectronic Technologies of National Academy of Sciences of Belarus
Belarus
PG student, researcher
Belarus
PG student, researcher
Y. V. Trofimov
Center of LED and Optoelectronic Technologies of National Academy of Sciences of Belarus
Belarus
PhD., director
Belarus
PhD., director
G. K. Zhavnerko
IZOVAC Technologies, Ltd.
Belarus
PhD.
Belarus
PhD.
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Review
For citations:
Cheliapin A.E., Begunov P.S., Trofimov Y.V., Zhavnerko G.K. LED ULTRAVIOLET EXPOSURE UNIT WITH ADJUSTABLE EXPOSURE TIME. Doklady BGUIR. 2019;(7 (125)):46-50. (In Russ.) https://doi.org/10.35596/1729-7648-2019-125-7-46-50
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