POROUS ANODISATION OF ALUMINUM FILMS WITH PHOTOLITOGRAPHIC MASK UNDER HIGH FORMING VOLTAGES
Abstract
The approach of aluminium porous anodisation has been proposed. Anodisation was realized under high forming voltages with Joule heat sink through aluminium tracks formed by a photolithographic mask. Record high forming voltages have been achieved leads to new tubular oxide structure with wide outer diameter of 50 - 400 nm and the high anodic process anisotropy up to 0,8. The results obtained can be explained by imposing the high electric field in the porous alumina barrier layer.
About the Author
S. K. Lazarouk
Белорусский государственный университет информатики и радиоэлектроники
Belarus
Belarus
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Review
For citations:
Lazarouk S.K. POROUS ANODISATION OF ALUMINUM FILMS WITH PHOTOLITOGRAPHIC MASK UNDER HIGH FORMING VOLTAGES. Doklady BGUIR. 2013;(3):52-57. (In Russ.)
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