For citations:
Villa N., Golosov D.A., Nguyen T.D. Formation of titanium oxide thin films by reactive magnetron sputtering. Doklady BGUIR. 2019;(5):87-93. (In Russ.) https://doi.org/10.35596/1729-7648-2019-123-5-87-93
Villa N., Golosov D.A., Nguyen T.D. Formation of titanium oxide thin films by reactive magnetron sputtering. Doklady BGUIR. 2019;(5):87-93. (In Russ.) https://doi.org/10.35596/1729-7648-2019-123-5-87-93