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Villa N., Golosov D.A., Nguyen T.D. Formation of titanium oxide thin films by reactive magnetron sputtering. Doklady BGUIR. 2019;(5):87-93. (In Russ.) https://doi.org/10.35596/1729-7648-2019-123-5-87-93

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ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)