Application of the method of self-extending high-temperature synthesis for receiving porous vacuum inserts of faceplates of electronic mechanical engineering equipment
Abstract
There are given the results of research the process of receiving by method of self-extending high-temperature synthesis of porous vacuum inserts of the faceplates used by production of semiconductor silicon plates at the enterprises of electronic mechanical engineering.
About the Authors
M. V. Tumilovich
Belarusian state university of informatics and radioelectronics
Belarus
Belarus
L. P. Pilinivich
Belarusian state university of informatics and radioelectronics
Belarus
Belarus
A. M. Taraykovich
SSI «Institute of powder metallurgy»
Belarus
Belarus
V. E. Tolstik
SSI «Institute of powder metallurgy»
Belarus
Belarus
G. A. Sheko
SSI «Institute of powder metallurgy»
Belarus
Belarus
References
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5. Такакура Т. Процессы получения функционально-градиентных материалов типа TiB2-Ni // Сборник Оасакского университета по обработке материалов. 1990. С. 234-236.
Review
For citations:
Tumilovich M.V., Pilinivich L.P., Taraykovich A.M., Tolstik V.E., Sheko G.A. Application of the method of self-extending high-temperature synthesis for receiving porous vacuum inserts of faceplates of electronic mechanical engineering equipment. Doklady BGUIR. 2017;(2):5-10. (In Russ.)
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