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FORMATION OF SILICON NANOWIRES BY METAL-ASSISTED CHEMICAL ETCHING AND STUDY OF ITS OPTICAL PROPERTIES

Abstract

The results of study and development of silicon nanowires (SiNWs) formation by metal-assisted chemical etching (MACE) are introduced. Linear dependence of SiNWs length from etching time is established. Total and mirror reflectance spectra, Raman scattering spectra of SiNWs and photoluminescence (PL) spectra are studied. Si band broadening and shifting to short-wave region in Raman spectra with increasing of etching time are revealed.

About the Authors

H. V. Bandarenka
Белорусский государственный университет информатики и радиоэлектроники
Belarus


K. V. Girel
Белорусский государственный университет информатики и радиоэлектроники
Belarus


S. A. Niauzorau
Белорусский государственный университет информатики и радиоэлектроники
Belarus


K. A. Gonchar
Московский государственный университет им. М.В. Ломоносова (физический факультет)
Belarus


V. U. Timoshenko
Московский государственный университет им. М.В. Ломоносова (физический факультет)
Belarus


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Review

For citations:


Bandarenka H.V., Girel K.V., Niauzorau S.A., Gonchar K.A., Timoshenko V.U. FORMATION OF SILICON NANOWIRES BY METAL-ASSISTED CHEMICAL ETCHING AND STUDY OF ITS OPTICAL PROPERTIES. Doklady BGUIR. 2016;(2):5-10. (In Russ.)

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ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)