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Koval’chuk N., Demidovich S., Vlasukova L., Parkhomenko I. Synthesis of Silicon Nitride Films with Improved Mechanical and Chemical Properties by ICPCVD Method. Doklady BGUIR. 2026;24(3):52-60. (In Russ.) https://doi.org/10.35596/1729-7648-2026-24-3-52-60

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ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)