Laser-Activated Photochemical Processes of Formation of Thin-Film Systems of Microelectronics

Abstract

The article presents the results of a study of laser-assisted electrochemical deposition of functional thinfilm submicron conductive structures using cyanide electrolytes. The effect of laser radiation with wavelengths of  λ = 600–200 nm on cyanide electrolytes was investigated. This radiation leads to the active dissociation of compounds of the K_iMe(CN)_j, Me_i(CN)_j, and K_iMe_i(CN)_j types. This promotes a local increase in the concentration gradient of active electrochemical species and causes an increase in the local rate of electrochemical deposition as a whole. The influence of such parameters as laser radiation intensity, the absorption coefficient of laser radiation by the electrolyte (effective absorption cross-section), and the dissociation quantum yield, which are determined by the composition of the electrolyte and the selectivity of the laser irradiation, on these processes was analyzed.