Features of Manufacturing the Element Base of High-Temperature Electronics Using Laser Radiation
https://doi.org/10.35596/1729-7648-2025-23-2-77-83
Abstract
The paper presents the results of research on laser processing of natural and artificial diamond crystals in microelectronics technologies by thermal laser separation. An analysis of physical-chemical phenomena observed as a result of the thermal effect of laser radiation on anisotropic materials in various crystallographic directions is conducted. Based on the Griffiths criterion, the mechanics of brittle fracture as a result of the formation of critical micromechanical stresses caused by the thermal action of laser radiation are analyzed. The non-stationary problem of thermal conductivity was solved, temperature distributions in the volume of the material were calculated, on the basis of which information on the change of elastic properties of crystals leading to its controlled destruction in given directions was obtained. The simulation results were confirmed experimentally in the processes of thermal laser separation of rough diamonds by forming localized areas of critical thermoelastic microstresses at a given depth in the crystal volume, which are the starting point of the line of controlled crystal separation. Optimal modes of controlled separation of crystals of natural and artificial diamonds using a diode-pumped laser with a radiation wavelength of 1064 nm have been identified.
About the Author
E. В. Shershnev
Francisk Skorina Gomel State University
Belarus
Belarus
Evgeny B. Shershnev, Dr. Sci. (Tech.), Associate Professor, Head of the Department of General Physics
246019, Gomel, Sovetskaya St., 102, Bld. 5
References
1. Kazyuchits N. M., Rusetsky M. S., Naumchik E. V., Kazyuchits V. N. (2016) Synthetic diamonds STM “Almazot” – Research Results and Some Applications. Materials and Structures of Modern Electronics: Collection of Scientific Papers of the VII International Scientific Conference Dedicated to the 50th Anniversary of the Department of Physics of Semiconductors and Nanoelectronics, Minsk, Oct. 12–13. Minsk, Publishing Center of the Belarusian State University. 62–67 (in Russian)
2. Bocharov A. M., Klimovich A. F., Starovoytov A. S., Snezhkov V. V. (1996) Wear of Diamond Single Crystals. Minsk, Belaruskaya Navuka Publ. (in Russian).
3. Kovalenko V. S., Romanenko V. V., Oleshchuk L. M. (1987) Low-Waste Laser Beam Cutting Processes. Kiev, Technics Publ. (in Russian).
4. Mityagin A. Yu., Altukhov A. A., Mityagina A. Yu. (2009) Technology and Equipment for Processing Diamond Materials of Modern Electronics. Technology and Design in Electronic Equipment. (1), 53–58 (in Russian).
5. Barretoa M. C., Roedera G., Steinhoffa M., Schellenbergera M., Bauer A. (2018) Advances in Thermal Laser Separation: Process Monitoring in a Kerf-Free Laser-Based Cutting Technology to Ensure High Yield. Procedia CIRP 74. 645–648.
6. Shkadov A. I. (1997) Physical Principles of Laser Processing of Diamonds. Smolensk (in Russian).
7. Nazarov S. A., Polyakova O. R. (1994) Griffiths Criterion for a Tensile Crack with Nonlinear Effects in the End Zones. Reports of the Academy of Sciences. 335 (2), 182–184 (in Russian).
8. Mazakov T. Zh., Dzhomartova Sh. A., Ziyatbekova G. Z., Toykenov G. Ch., Arshidinova M. T., Mazakova A. T. (2020) Solution of the Heat Conduction Equation of a Cylindricalrod. Bulletin of the Kazakh University of Technology and Business. (1), 13–21 (in Russian).
9. Emelyanov V. A., Shershnev E. B., Nikitjuk Y. V., Sokolov S. I., Aushev I. Y. (2022) Optimization of Laser Processing of Diamonds. Problems of Physics, Mathematics and Technics. 53 (4), 30–36 (in Russian).
10. Emelyanov V. A., Shershnev E. B., Kupo A. N., Sokolov S. I. (2022) Study of the Influence of Impurities on the Processes of Formation of Synthetic Diamond in the Zone of Thermal Influence of Laser Radiation. News of the Francisk Skorina Gomel State University. Natural Sciences. 132 (3), 117–120 (in Russian).
11. Dyakonov V. P. (2012) MATLAB. A Complete Tutorial. Moscow, DMK Press Publ. (in Russian).
12. Nenakhov E. V., Kartashov E. M. (2022) Estimates of Temperature Stresses in Models of Dynamic Thermoelasticity. Bauman Moscow State Technical University Bulletin. Natural Sciences. (1), 88–106 (in Russian).
Review
For citations:
Shershnev E.В. Features of Manufacturing the Element Base of High-Temperature Electronics Using Laser Radiation. Doklady BGUIR. 2025;23(2):77-83. (In Russ.) https://doi.org/10.35596/1729-7648-2025-23-2-77-83
Views:
19
Email this article 