Selecting the Trajectory of the Laser Beam to Form Vias in the Silicon Substrate | Lapo | Doklady BGUIR

Doklady BGUIR
Doklady BGUIR

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ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)

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Lapo A.I. Selecting the Trajectory of the Laser Beam to Form Vias in the Silicon Substrate. Doklady BGUIR. 2024;22(6):38-44. (In Russ.) https://doi.org/10.35596/1729-7648-2024-22-6-38-44

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ISSN 1729-7648 (Print)
ISSN 2708-0382 (Online)