For citations:
Lopato U.P., Laputko D.D., Grevtsov N.L., Bondarenko V.P. Structural Features of Porous Silicon Formed on Heavily Doped Plates of Single-Crystal Silicon with Electron Conductivity. Doklady BGUIR. 2024;22(5):17-25. (In Russ.) https://doi.org/10.35596/1729-7648-2024-22-5-17-25