For citations:
Pilipenko V.A., Kovalchuk N.S., Solovjov J.A., Shestovski D.V., Zhyhulin D.V. The Influence of Rapid Heat Treatment During the Formation of Aluminum-Polysilicon Contacts on the Electrical Parameters of CMOS Microcircuits. Doklady BGUIR. 2024;22(5):5-11. (In Russ.) https://doi.org/10.35596/1729-7648-2024-22-5-5-11