For citations:
Dostanko A.P., Madveyko S.I., Telesh E.V., Melnikov S.N., Zavadski S.M., Golosov D.A. Plasma Systems in Thin Film Technology. Doklady BGUIR. 2024;22(2):20-31. (In Russ.) https://doi.org/10.35596/1729-7648-2024-22-2-20-31
Dostanko A.P., Madveyko S.I., Telesh E.V., Melnikov S.N., Zavadski S.M., Golosov D.A. Plasma Systems in Thin Film Technology. Doklady BGUIR. 2024;22(2):20-31. (In Russ.) https://doi.org/10.35596/1729-7648-2024-22-2-20-31