Optical, Mechanical and Electrical Characteristics of Thermal Uncooled Bolometric Type Detector Based on Vanadium Oxide
https://doi.org/10.35596/1729-7648-2023-21-6-84-91
Abstract
Determination of optical, mechanical and electrical characteristics is one of the decisive factors in the design of instrumentation structures of thermal uncooled bolometer-type detectors (microbolometers). The paper presents the results of optimization calculations by means of computer simulation of absorption, transmittance and reflection spectra of device structures of microbolometers based on thermosensitive vanadium oxide film by finite-difference time-domain method (FDTD). The characteristics of the investigated microbolometer structure were checked for compliance with mechanical and electrical requirements for this class of devices.
Keywords
uncooled bolometric type thermal detector,
microbolometer,
infrared detector,
LWIR,
characterization,
vanadium oxide,
modeling
Supporting agencies: The research was carried out within the framework of solving the tasks of task 3.3 of the State Research Program “Photonics and Electronics for Innovations”.
About the Authors
Van Trieu Tran
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Postgraduate at Micro- and Nanoelectronics Department
Minsk
K. V. Korsak
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Kiryl V. Korsak, Master’s Student at Micro- and Nanoelectronics Department
Minsk
P. E. Novikov
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Pavel E. Novikov, Master’s Student at Micro- and Nanoelectronics Department
Minsk
I. Yu. Lovshenko
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Lovshenko Ivan Yur’evich, Head of the Research Laboratory “CAD in Micro- and Nanoelectronics” (Research Lab. 4.4) of R&D Department
220013, Minsk, P. Brovki St., 6
Теl.: +375 17 293-88-90
S. M. Zavadski
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Sergey M. Zavadski, Саnd. of Sci., Associate Professor, Associate Professor at the Department of Electronic Engineering and Technology, Head of “Electronic Technologies and Technical Diagnostics of Technological Media and Solid-State Structures” (Center 9.1) of R&D Department
Minsk
D. A. Golosov
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Dzmitry A. Golosov, Саnd. of Sci., Associate Professor, Associate Professor at the Department of Electronic Enginee ring and Technology, Leading Researcher at the Center 9.1 of R&D Department
Minsk
A. A. Stepanov
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Andrey A. Stepanov, Саnd. of Sci., Associate Professor, Associate Professor at Micro- and Nanoelectronics Department, Senior Researcher at the Research Lab. 4.7 of R&D Department
Minsk
A. А. Hubarevich
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Aliaksandr А. Hubarevich, Senior Researcher at the Research Laboratory “Information Processing and Display Devices” (Research Lab. 4.7) of R&D Department
Minsk
V. V. Kolos
JSC “INTEGRAL” – “INTEGRAL” Holding Managing Company
Belarus
Belarus
Vladimir V. Kolos, Саnd. of Sci., Deputy Head of the Industry Laboratory of New Technologies and Materials
Minsk
Ya. A. Solovjov
JSC “INTEGRAL” – “INTEGRAL” Holding Managing Company
Belarus
Belarus
Yaroslav A. Solovjov, Cand of Sci., Associate Professor, Head of the Industry Laboratory of New Technologies and Materials
Minsk
D. S. Liauchuk
JSC “INTEGRAL” – “INTEGRAL” Holding Managing Company
Belarus
Belarus
Dzmitry S. Liauchuk, Engineer of the Industry Laboratory of New Technologies and Materials
Minsk
V. R. Stempitsky
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Viktor R. Stempitsky, Cand of Sci., Associate Professor, Vice-Rector for Academic Affairs, Adviser of the Research Lab. 4.4
Minsk
References
1. Michel M., Blaeser S., Litke A. (2023) Uncooled Thermal MWIR Imagers for High-Temperature Imaging Applications. Proc. SPIE 12737, Electro-Optical and Infrared Systems: Technology and Applications XX. 1273703.
2. Karthik P. V., Isha Y., Ajitha B. (2022) Advancements of Uncooled Infrared Microbolometer Materials: A Review. Sensors and Actuators A: Physical. 342, 113611.
3. Dasom W., Jaeyeong B., Hyung-Jin C. (2023) Modification of Electrical Properties of Amorphous Vanadium Oxide (a-VOx) Thin Film Thermistor for Microbolometer. Journal of Alloys and Compounds. 937, 168295.
4. Teixeira F. L. (2023) Finite-Difference Time-Domain Methods. Nat Rev Methods Primers. 3, 76.
5. Smith P. W., Turner E. H. (1977) A Bistable Fabry‐Perot Resonator. Applied Physics Letters. 30 (6), 280–281.
6. Tran Van Trieu, Korsak K. V., Novikov P. E., Lovshenko I. Yu., Zavadski S. M., Golosov D. A., Stepanov A. A., Hubarevich A. А., Kolos V. V., Solovjov Ya. A., Liauchuk D. S., Stempitsky V. R. (2023) Calculation of Optical Parameters of Thin Films of Structural Materials of Thermal Uncooled Bolometric Type Detector. Doklady BGUIR. 21 (5), 73–80. http://dx.doi.org/10.35596/1729-7648-2023-21-5-73-80 (in Russian).
7. Awad E. S., Al-Khalli N., Abdel-Rahman M., Alduraibi M., Debbar N. (2015). Comparison of V2O5 Microbolometer Optical Performance Using NiCr and Ti Thin-Films. IEEE Photonics Technology Letters. 27 (5), 462–465.
Review
For citations:
Tran V., Korsak K.V., Novikov P.E., Lovshenko I.Yu., Zavadski S.M., Golosov D.A., Stepanov A.A., Hubarevich A.А., Kolos V.V., Solovjov Ya.A., Liauchuk D.S., Stempitsky V.R. Optical, Mechanical and Electrical Characteristics of Thermal Uncooled Bolometric Type Detector Based on Vanadium Oxide. Doklady BGUIR. 2023;21(6):84-91. (In Russ.) https://doi.org/10.35596/1729-7648-2023-21-6-84-91
Views: 191
Email this article 