Calculation of Optical Parameters of Thin Films of Structural Materials of Thermal Uncooled Bolometric Type Detector
https://doi.org/10.35596/1729-7648-2023-21-5-73-80
Abstract
The increased interest in utilizing uncooled thermal bolometer-type detectors (microbolometers) within the infrared or terahertz detection field is justified by their operational and technological characteristics, in particular: relatively low manufacturing cost, high detection efficiency, compatibility with silicon CMOS technology, and operation at room temperature. The performance of such detectors depends on optimizing critical parameters, which are dictated by both the geometrical design and the electrical, optical, and thermal properties of the materials used. The determination of optical parameters stands as a decisive factor in the design of microbolometer structures. This article delves into the examination of optical parameters of thin films of structural materials of microbolometer based on thermosensitive vanadium oxide film manufactured at JSC “INTEGRAL”. The investigation showcases the results of determining optical constants (refractive indexes n and absorption coefficients k) of thin films from the transmission curve by applying the reflection-transmission method. Furthermore, a comparison is carried out between the results of computer modeling of the transmission, reflection and absorption spectra – taking into account the obtained values of the coefficients n and k – and the empirical data from the in-situ experiment.
Keywords
uncooled thermal bolometric detector,
microbolometer,
infrared detector,
optical parameters,
vanadium
oxide,
modeling
Supporting agencies: The research was carried out within the framework of solving the tasks of task 3.3 of the State Research Program “Photonics and Electronics for Innovations”.
About the Authors
Van Trieu Tran
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Postgraduate at Micro- and Nanoelectronics Department
Minsk
K. V. Korsak
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Kiryl V. Korsak, Master’s Student at Micro- and Nanoelectronics Department
Minsk
P. E. Novikov
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Pavel E. Novikov, Master’s Student at Micro- and Nanoelectronics Department
Minsk
I. Yu. Lovshenko
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Lovshenko Ivan Yur’evich, Head of the Research La boratory “CAD in Micro- and Nanoelectronics” (Research Lab. 4.4) of R&D Department
220013, Minsk, P. Brovki St., 6
Теl.: +375 17 293-88-90
Minsk
S. M. Zavadski
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Sergey M. Zavadski, Саnd. of Sci., Associate Professor, Associate Professor at the Department of Electronic Engineering and Technology, Head of “Electronic Technologies and Technical Diagnostics of Technological Media and Solid-State Structures” (Center 9.1) of R&D Department
Minsk
D. A. Golosov
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Dzmitry A. Golosov, Саnd. of Sci., Associate Professor, Associate Professor at the Department of Electronic Engineering and Technology, Leading Researcher at the Center 9.1 of R&D Department
Minsk
A. A. Stepanov
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Andrey A. Stepanov, Саnd. of Sci., Associate Professor, Associate Professor at Micro- and Nanoelectronics Department, Senior Researcher at the Research Laboratory “Information Processing and Display Devices” (Research Lab. 4.7) of R&D Department
Minsk
A. A. Hubarevich
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Aliaksandr А. Hubarevich, Senior Researcher at the Research Lab. 4.7 of R&D Department
Minsk
V. V. Kolos
JSC “INTEGRAL” – “INTEGRAL” Holding Managing Company
Belarus
Belarus
Vladimir V. Kolos, Саnd. of Sci., Deputy Head of the Industry Laboratory of New Technologies and Materials
Minsk
Ya. A. Solovjov
JSC “INTEGRAL” – “INTEGRAL” Holding Managing Company
Belarus
Belarus
Yaroslav A. Solovjov, Cand of Sci., Associate Professor, Head of the Industry Laboratory of New Technologies and Materials
Minsk
D. S. Liauchuk
JSC “INTEGRAL” – “INTEGRAL” Holding Managing Company
Belarus
Belarus
Dzmitry S. Liauchuk, Engineer of the Industry Laboratory of New Technologies and Materials
Minsk
V. R. Stempitsky
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Viktor R. Stempitsky, Cand of Sci., Associate Professor, Vice-Rector for Academic Affairs, Adviser of the Research Lab. 4.4
Minsk
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Review
For citations:
Tran V., Korsak K.V., Novikov P.E., Lovshenko I.Yu., Zavadski S.M., Golosov D.A., Stepanov A.A., Hubarevich A.A., Kolos V.V., Solovjov Ya.A., Liauchuk D.S., Stempitsky V.R. Calculation of Optical Parameters of Thin Films of Structural Materials of Thermal Uncooled Bolometric Type Detector. Doklady BGUIR. 2023;21(5):73-80. (In Russ.) https://doi.org/10.35596/1729-7648-2023-21-5-73-80
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