Design and Performance of Amorphous Silicon Based on Uncooled Bolometer-Type Infrared Focal Plane Arrays
https://doi.org/10.35596/1729-7648-2023-21-2-77-85
Abstract
Uncooled bolometric type thermal detectors, combined into a matrix and placed into a focal plane array have the following characteristics: low cost, operation at room temperature, compatibility with the silicon CMOS technology, and high detecting performance; therefore recently it became a hot spot in infrared or terahertz detection field. The performance of uncooled infrared focal plane detector arrays depends on the optimization of critical parameters which are determined by geometrical design and the electrical, optical, and thermal physical properties of the detector materials. We report the study of a fabrication process and characterization of two (2D) dimensional arrays of uncooled microbolometers based on silicon (α-Si) thermo-sensing films. Because these arrays substantially reduce sensor size, they are becoming the preferred format for most modern applications.
About the Authors
Van Trieu Tran
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Postgraduate of Micro- and Nanoelectronics Department
Minsk
V. R. Stempitsky
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Cand. of Sci., Associate Professor, Vice-Rector for Academic Affairs, Adviser of Laboratory “CAD in Micro- and Nanoelectronics” at the Research Department of the
Minsk
I. Yu. Lovshenko
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Lovshenko Ivan Yur’evich, Head of the Research Laboratory “CAD in Micro- and Nanoelectronics” at the Research Department
220013, Minsk, P. Brovki St., 6
Теl.: +375 17 293-88-90
K. V. Korsak
Belarusian State University of Informatics and Radioelectronics
Belarus
Belarus
Master’s Student at the Micro- and Nanoelectronics Department
Minsk
Dinh Ha Dao
Le Quy Don University of Science and Technology
Viet Nam
Viet Nam
Cand. of Sci.
Hanoi
References
1. Wood R. A., Han C. J., Kruse P. W. (1992) Integrated Uncooled Infrared Detector Imaging Arrays. Solid-State Sensor and Actuator Workshop, 5th Technical Digest. IEEE. 132–135.
2. Takamuro Daisuke, Tomohiro Maegawa, Takaki Sugino (2011) Development of New SOI Diode Structure for Beyond 17 um Pixel Pitch SOI Diode Uncooled IRFPAs. Proceedings of SPIE – the International Society for Optical Engineering. 8012, 80121E.
3. Li C., Han C. J., Skidmore G. D., Hess. C. (2010) DRS Uncooled VOx Infrared Detector Development and Production Status. Proc SPIE. 7660, 76600V.
4. Biao Li (2004) Design and Simulation of an Uncooled Double-Cantilever Microbolometer with the Potential for ~ mK NETD. Sensor and Actuators A: Physical. 112 (2), 351–359.
5. Sedky S., Fiorini P., Caymax M., Agnes V., Baert C. (1998) IR Bolometers Made of Polycrystalline Silicon Germanium. Sensors and Actuators A. 66 (1–3), 193–199.
6. Heredia-J. A., Torres-J. A., De la Hidalga-W. F. J., Jaramillo-N. A. (2002) A Boron Doped Amorphous Silicon Thin-Film Bolometer for Long Wavelength Detection. Mat. Res. Soc. Symp. Proc. (744), M5.26.1–M5.26.6.
7. Kosarev A., Moreno M., Torres A., Zuñiga C. (2008) IR Sensors Based on Silicon–Germanium–Boron Alloys Deposited by Plasma: Fabrication and Characterization. J. of Non-Crystalline Solids. 354 (19–25), 2561–2564.
8. Tisse C.-L., Tissot J.-L., Crastes A. (2012) An Information-Theoretic Perspective on the Challenges and Advances in the Race Toward 12 µm Pixel Pitch Megapixel Uncooled Infrared Imaging. Proceedings of the SPIE. 8353.
9. Hee Yeom Kim, Kyoung Min Kim, Byeong Il Kim et al. (2011) Mechanical Robustness of FPA in a-Si Microbolometer with Fine Pitch. Sensors & Transducers Journal (11), 56–63.
10. Abbasi S., Shafique A., Ceylan O., Kaynak C. B., Kaynak M., Gurbuz Y. (2018) A Test Platform for the Noise Characterization of SiGe Microbolometer ROICs. IEEE Sensors Journal (18), 6217.
11. Mottin E., Bain A., Martin J. L., Ouvrier-Buffet J. L., Bisotto S., Yon J. J., Tissot J. L. (2003) Uncooled Amorphous Silicon Technology Enhancement for 25 µm Pixel Pitch Achievement. Proceedings of the SPIE. 4820, 200–207.
12. Murphy D., Ray M., Wyles J., Asbrock J., Hewitt C., Wyles R., Gordon E., Sessler T., Kennedy A., Baur S., Van Lue D. (2004) Performance Improvements for VOx Microbolometer FPAs. Proceedings of the SPIE. 5406, 531–540.
Review
For citations:
Tran V., Stempitsky V.R., Lovshenko I.Yu., Korsak K.V., Dao D. Design and Performance of Amorphous Silicon Based on Uncooled Bolometer-Type Infrared Focal Plane Arrays. Doklady BGUIR. 2023;21(2):77-85. https://doi.org/10.35596/1729-7648-2023-21-2-77-85
Views: 482
Email this article 