For citations:

Yunik A.D., Solovjov J.A. Effect of Rapid Thermal Annealing Conditions on the Specific Resistance of the Ohmic Contacts of Ti/Al/Ni/Au Metallization to the GaN/AlGaN Heterostructure. Doklady BGUIR. 2022;20(8):14-20. (In Russ.) https://doi.org/10.35596/1729-7648-2022-20-8-14-20