For citations:
Kovalchuk N.S., Omelchenko A.A., Pilipenko V.A., Solodukha V.A., Demidovich S.V., Kolos V.V., Filipenia V.A., Shestovski D.V. Research of Electrophysical Properties of Thin Gate Dielectrics Obtained by Rapid Thermal Processing Method. Doklady BGUIR. 2022;20(4):44-52. (In Russ.) https://doi.org/10.35596/1729-7648-2022-20-4-44-52
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