Mathematical simulation of the processes of two-beam laser controlled thermal-splitting of quartz glass
https://doi.org/10.35596/1729-7648-2021-19-7-80-88
Abstract
The paper presents the results of modeling the processes of controlled thermal cracking of quartz glass under the parallel action of two infrared laser beams of different geometries on the material: with maximum intensity in the center and with zero intensity in the center (annular section). To calculate the temperature distribution in the material, the method of Green's functions was used, which allows us to obtain a well-interpreted solution for almost any type of function of surface heat sources. Further, taking into account the quasi-static approach, using the methods of the classical theory of thermoelasticity, thermoelastic microstresses were calculated, both on the surface and in the depth of the material. It is established that the simultaneous use of these two types of laser exposure makes it possible to control the temperature field more efficiently, and create prerequisites for the most stable formation of a microcrack. The simulation results show that with a bi-beam effect, the micromechanical stresses necessary for the formation of a microcrack are realized in shorter time intervals, both on the surface and in the depth of the material, which allows increasing the processing speed by up to 30 %. Strengthening control over the process of controlled thermal cracking can significantly reduce the percentage of defects and improve the quality of the resulting microeletronics products.
About the Authors
V. A. Emelyanov
JSC “INTEGRALˮ – the managing company of the “Integralˮ holding
Belarus
Belarus
Emelyanov V.A., D.Sc., Professor, Corresponding Member of the National Academy of Sciences of Belarus, Member of the International Institute of Electrical and Electronic Engineers, Honored Inventor of the Republic of Belarus
Minsk
E. B. Shershnev
Francisk Skaryna Gomel State University
Belarus
Belarus
Shershnev E.B., PhD, Associate Professor, Head of the Department of General Physics
Gomel
S. I. Sokolov
Francisk Skaryna Gomel State University
Belarus
Belarus
Sokolov S.I., Senior Lecturer at the Department of General Physics
Gomel
A. N. Kupo
Francisk Skaryna Gomel State University
Belarus
Belarus
Kupo A.N., PhD, Associate Professor, Head of the Information and Computing Center
Gomel
References
1. Shalupaev S.V., Serdyukov A.N., Mityurich G.S., Aleksiejuk M., Sereda A.A. The Analysis of Laser Thermosplitting of Fragile Materials by Using of Special Geometry Beams. Ceramics. Polish ceramic bulletin. 2001;65:75.
2. Sysoev V.K., Papchenko B.P., Zakharchenko A.V., Vyatlev P.A. [Increasing the efficiency of controlled laser thermal cleaving of dielectric materials]. Optical journal. 2004;71(2):65. (In Russ.)
3. Tsai C., Chen H. Laser cutting of thick ceramic substrates by controlled fracture technique. Journal of materials processing technology. 2003;136:166.
4. Shershnev E.B., Sviridova V.V., Sokolov S.I. [Optimization of the process of laser controlled parallel thermal splitting of brittle non-metallic materials]. International scientific and practical journal. Emergencies: Education and Science. 2008;3(1):90-96. (In Russ.)
5. Shershnev E.B., Nikityuk Yu.V., Sholokh V.F., Sokolov S.I. [Laser controlled thermal cleavage of crystalline quartz]. Gomel scientific seminar on theoretical physics dedicated to the 100th anniversary of the birth of F.I. Fedorov, June 20–22, 2011: materials. Gomel: GSU im. F. Skorina. 2011;261-265. (In Russ.)
6. Shalupaev S.V,. Shershnev E.B,. Nikityuk Yu.V, Sereda A.A. [Two-beam laser thermal splitting of brittle nonmetallic materials]. Optical Journal. 2005;73(5):62-66. (In Russ.)
7. Prokhorov A.I., Konov V.I., Ursu I., Mikheilesku I.N. [Interaction of laser radiation with metals]. Мoscow: Nauka; 1988: 538. (In Russ.)
8. Kondratenko V.S., Tanaseichuk A.S., Shershnev E.B. [New effective methods of laser processing of sheet glass]. Elektronnaya tekhnika. Seriya II. Lazernaya tekhnika i optoelektronika. 1986;40(4):38-45. (In Russ.)
9. Carslow G., Jaeger D. [Thermal conductivity of solid bodies]. Мoscow: Nauka; 1964. (In Russ.)
10. Nissim Y.I., Lietoila A., Gold R.B., Gibbons J.F. Temperature distributions produced in semiconductors by a scanning elliptical or circular cw laser beam. J. Appl. Phys. 1980;51(1):274-279.
11. Kondratenko V.S., Serdyukov A.N. [Calculation of temperature fields in controlled laser thermal splitting]. Elektronnaya tekhnika. Seriya II. Lazernaya tekhnika i optoelektronika. 1984;31(5):62-66. (In Russ.)
12. Sanders D.J. Temperature distributions produced by scanning Gaussian laser beams. Applied optics. 1984;23(1):30-35.
13. Kondratenko V.S., Serdyukov A.N., Shalupaev S.V. [Laser heating of materials with thermal splitting taking into account heat transfer]. Elektronnaya tekhnika. Seriya II. Lazernaya tekhnika i optoelektronika. 1987;41(1):7-10. (In Russ.)
14. Parkus G. [Transient temperature stresses]. Мoscow: Fizmatgiz; 1963. (In Russ.)
15. Boli B., Weiner J. [Theory of temperature stresses]. Мoscow: Mir; 1964. (In Russ.)
Review
For citations:
Emelyanov V.A., Shershnev E.B., Sokolov S.I., Kupo A.N. Mathematical simulation of the processes of two-beam laser controlled thermal-splitting of quartz glass. Doklady BGUIR. 2021;19(7):80-88. (In Russ.) https://doi.org/10.35596/1729-7648-2021-19-7-80-88
Views: 4526
Email this article 