AMMONIA MOLECULAR BEAM EPITAXY OF AlGaN HETEROSTRUCTURES ON SAPPHIRE SUBSTRATES
https://doi.org/10.35596/1729-7648-2019-125-7-144-151
Abstract
In order to develop a technology for the growth of Al(Ga)N-based heterostructures, the effect of different molecular beam epitaxy growth conditions on the properties of AlN and AlGaN layers was studied. The optimal conditions for the growth of AlN buffer layers were established, which made it possible to achieve a root mean square roughness as small as 0.7 nm. It was shown that an increase of AlN layer thickness leads to a decrease of density of edge dislocations, while no explicit dependence of the screw dislocation density
on the layer thickness was observed. The minimal obtained dislocations density values for 1.25μm-thick AlN layer were nedges = 5.9×109 cm-2 and nscrew = 2.2×107 cm-2 for edge and screw dislocations respectively. As a result of optimization of the AlGaN growth temperature, a series of 0.15μm-thick layers was grown, which showed stimulated emission at wavelengths λ = 330 nm, 323 nm, 303 nm, and 297 nm with threshold power
densities of 0.7 MW/cm2, 1.1 MW/cm2, 1.4 MW/cm2 and 1.4 MW/cm2, respectively. The determined optimal epitaxy conditions for AlN and AlGaN layers were used to grow the AlGaN/GaN high electron mobility transistor structure on a sapphire substrate with two-dimensional electron gas, which had a mobility of 1950 cm2/(Vs) at a concentration of 1.15×1013 cm-2. The obtained results are important for creating of nitride-based
UV-emitting optoelectronic semiconductor devices, as well as high-power and high-frequency electronic devices.
on the layer thickness was observed. The minimal obtained dislocations density values for 1.25μm-thick AlN layer were nedges = 5.9×109 cm-2 and nscrew = 2.2×107 cm-2 for edge and screw dislocations respectively. As a result of optimization of the AlGaN growth temperature, a series of 0.15μm-thick layers was grown, which showed stimulated emission at wavelengths λ = 330 nm, 323 nm, 303 nm, and 297 nm with threshold power
densities of 0.7 MW/cm2, 1.1 MW/cm2, 1.4 MW/cm2 and 1.4 MW/cm2, respectively. The determined optimal epitaxy conditions for AlN and AlGaN layers were used to grow the AlGaN/GaN high electron mobility transistor structure on a sapphire substrate with two-dimensional electron gas, which had a mobility of 1950 cm2/(Vs) at a concentration of 1.15×1013 cm-2. The obtained results are important for creating of nitride-based
UV-emitting optoelectronic semiconductor devices, as well as high-power and high-frequency electronic devices.
About the Authors
M. V. Rzheutski
B.I. Stepanov Institute of Physics of NAS of Belarus
Russian Federation
Russian Federation
Rzheutski M.V., PhD, senior researcher
220072, Minsk, Nezavisimosti ave., 68-2,
Ja. A. Solovjov
«Integral» holding managing company
PhD, Associate Professor, Deputy Director of «Transistor» Branch
PhD, Associate Professor, Deputy Director of «Transistor» Branch
A. G. Vainilovich
B.I. Stepanov Institute of Physics of NAS of Belarus
researcher
researcher
I. Ya. Svitsiankou
B.I. Stepanov Institute of Physics of NAS of Belarus
researcher
researcher
A. N. Pyatlitski
«Integral» holding managing company
PhD, Associate Professor, Director of SC «Belmicroanalysis» Branch
PhD, Associate Professor, Director of SC «Belmicroanalysis» Branch
D. V. Zhyhulin
«Integral» holding managing company
Head of Sector of SC «Belmicroanalysis» of «Belmicrosystems» Branch
Head of Sector of SC «Belmicroanalysis» of «Belmicrosystems» Branch
E. V. Lutsenko
B.I. Stepanov Institute of Physics of NAS of Belarus
PhD, As. Prof., Deputy Head of Centrum
PhD, As. Prof., Deputy Head of Centrum
References
1. Mishra U.K., Parikh P., Wu Y. F. AlGaN/GaN HEMTs: An overview of device operation and applications. Proceedings of the IEEE. 2002; 90:1022. DOI: 10.1109/JPROC.2002.1021567.
2. Alyamani A., Lutsenko E.V., Rzheutski M.V., Zubialevich V.Z., Vainilovich A.G., Svitsiankou I.E., Shulenkova V.A., Yablonskii G.P., Petrov S.I., Alexeev A.N. AlGaN/GaN high electron mobility transistor heterostructures grown by ammonia and combined plasma-assisted ammonia molecular beam epitaxy. Japanese Journal of Applied Physics. 2019; 58:SC1010. doi: 10.7567/1347-4065/ab06b4.
3. Xiong J., Tang J., Liang T., Wang Y., Xue C., Shi W., Zhang W. Characterization of crystal lattice constant and dislocation density of crack-freeGaN films grown on Si(111). Appl. Surf. Sci. 2010; 257:1161-1165. DOI:10.1016/j.apsusc.2010.07.073.
4. Alexeev A.N., Krasovitsky D.M., Petrov S.I., Chaly V.P., Mamaev V.V., Sidorov V.G. Specific features of NH3 and plasma-assisted MBE in the fabrication of III-N HEMT heterostructures. Semiconductors. 2015; 49:92-94. DOI: 10.1134/S1063782615010029.
5. Neumayer D. A., Ekerdt J. G. Synthesis of Gallium Nitride Nanoparticles by Microwave Plasma Enhanced CVD. Chemical Vapor Deposition. 1996; 16:151-156. DOI: 10.1002/cvde.200906811.
6. Fu W. Y., Kappers M. J., Zhang Y., Humphreys C. J., Moram M. A. Dislocation Climb in c-Plane AlN Films. Appl. Phys. Express. 2011; 4:065503. DOI:10.1143/APEX.4.065503.
7. Li X.-H., Wang S., Xie H., Wei Y. O., Kao T.-T., Satter Md. M., Shen S.-C., Yoder P. D., Detchprohm T., Dupuis R. D., Fischer A. M., Ponce F. A. Growth of high
8. Webb J. B., Tang H., Bardwell J. A., Moisa S., Peters C., MacElwee T. Defect reduction in GaN epilayers and HFET structures grown on (0 0 0 1)sapphire by ammonia MBE. Journal of Crystal Growth. 2001; 79: 584-589. doi.org/10.1016/S0022-0248(01)01266-0.
9. Alexeev A.N., Borisov B.A., Chaly V.P., Demidov D.M., Dudin A.L., Krasovitsky D.M., Pogorelsky Yu.V., Shkurko A.P., Sokolov I.A., Stepanov M.V., Ter-Martirosyan A.L. The growth rate evolution versus substrate temperature and V/1II ratio during GaN MBE using ammonia. Mater. Res. Soc. Internet J. Nitride Semicond. Res. 1999; 4:e6. DOI: https://doi.org/10.1557/S1092578300000624.
10. Pikhtin N., Hegazy H.H. Fundamental absorption edge of semiconductor alloys with the direct-gap energy-band structure. 2009; 43:1259. doi:10.1134/S1063782609100029.
Review
For citations:
Rzheutski M.V., Solovjov J.A., Vainilovich A.G., Svitsiankou I.Ya., Pyatlitski A.N., Zhyhulin D.V., Lutsenko E.V. AMMONIA MOLECULAR BEAM EPITAXY OF AlGaN HETEROSTRUCTURES ON SAPPHIRE SUBSTRATES. Doklady BGUIR. 2019;(7 (125)):144-151. (In Russ.) https://doi.org/10.35596/1729-7648-2019-125-7-144-151
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