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JOULE HEAT CALCULATION IN POROUS ALUMINA BARRIER LAYER DURING ELECTROCHEMICAL ANODIZING PROCESS

Abstract

Heat-segregation calculations inside porous alumina barrier layer have been performed. It is shown that Joule heat on pore bottom surface is four orders of magnitude greater than in other porous oxide areas. This effect leads to local heating of this areas and microplasma formations during anodizing process. The recommendations about the heat dissipation efficiency increasing in order to improve the uniformity of the structures have been advised.

About the Authors

P. .. Katsuba
Белорусский государственный университет информатики и радиоэлектроники
Belarus


A. .. Leshok
Белорусский государственный университет информатики и радиоэлектроники
Belarus


V. .. Vysotskiy
Белорусский государственный университет информатики и радиоэлектроники
Belarus


S. .. Lazarouk
Белорусский государственный университет информатики и радиоэлектроники
Belarus


References

1. Lazarouk S., Katsouba S., Leshok A., et. al. // Microelectronic Engineering. 2000. Vol. 50. №1-4. P. 321-327.

2. Katsuba P., Jaguiro P., Lazarouk S., et. al. // Physica E. Low-dimensional Systems and Nanostructures. 2009. Vol. 41. P.931-934.

3. S.K. Lazarouk, A.A. Leshok, V.A. Labunov, et. al. // Semiconductors. 2005. Vol. 39. №1. P. 149-152.

4. Chu S., Wada K., Inoue S., et. al. // Adv. Mater. 2005. Vol. 17. P. 2115.

5. Lazarouk S., Baranov I, Maello G., et. al. // Journal of Electrochemical Society. 1994. Vol. 141. P. 2556-2559.

6. Lazarouk S., Sasinovich D., Borisenko V., et. al. // Journal of Applied Physics. 2010. Vol. 107. P. 1-5.

7. Юнг Л. // Анодные оксидные пленки. Л., 1961.

8. Lee W., Kim J., Cosele V. // Adv. Funct. Mater. 2010. Vol. 20. P. 21-27.

9. Lazarouk S., Katsouba S., Leshok A., et. al. // Microelectronic Engineering. 2000. Vol. 50. №1-4. P. 321-327.

10. Katsuba P., Jaguiro P., Lazarouk S., et. al. // Physica E. Low-dimensional Systems and Nanostructures. 2009. Vol. 41. P.931-934.

11. S.K. Lazarouk, A.A. Leshok, V.A. Labunov, et. al. // Semiconductors. 2005. Vol. 39. №1. P. 149-152.

12. Chu S., Wada K., Inoue S., et. al. // Adv. Mater. 2005. Vol. 17. P. 2115.

13. Lazarouk S., Baranov I, Maello G., et. al. // Journal of Electrochemical Society. 1994. Vol. 141. P. 2556-2559.

14. Lazarouk S., Sasinovich D., Borisenko V., et. al. // Journal of Applied Physics. 2010. Vol. 107. P. 1-5.

15. Юнг Л. // Анодные оксидные пленки. Л., 1961.

16. Lee W., Kim J., Cosele V. // Adv. Funct. Mater. 2010. Vol. 20. P. 21-27.


Review

For citations:


Katsuba P..., Leshok A..., Vysotskiy V..., Lazarouk S... JOULE HEAT CALCULATION IN POROUS ALUMINA BARRIER LAYER DURING ELECTROCHEMICAL ANODIZING PROCESS. Doklady BGUIR. 2012;(7):55-60. (In Russ.)

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ISSN 2708-0382 (Online)