bsuirДоклады БГУИРDoklady BGUIR1729-76482708-0382БГУИР10.35596/1729-7648-2024-22-4-14-21bsuir-3951Research ArticleСтатьиФотоприемники ультрафиолетового диапазона на основе легированных алюминием и никелем пленок оксида цинкаUV-Photodetectors Based on Zinc Oxide Films Doped with Aluminum and NickelГрековИ. А.GrekovI. A.

Греков Игорь Александрович, асп. каф. микро- и наноэлектроники, мл. науч. сотр. науч.-исслед. лаб. «Материалы и структуры наноэлектроники» (НИЛ 4.3),

220013, г. Минск, ул. П. Бровки, 6.

Тел.: +375 33 667-93-28.

Grekov Igor Alexandrovich, Postgraduate at the Department of Micro and Nanoelectronics, Junior Researcher at the Scientific Research Laboratory “Materials and Structures of Nanoelectronics” (Lab. 4.3),

6, P. Brovki St., Minsk, 220013.

Phone: +375 33 667-93-28

igrekovscience@gmail.comЯнушкевичК. О.YanushkevichK. O.

Янушкевич К. О., асп. каф. микро- и наноэлектроники, мл. науч. сотр. НИЛ 4.3,

Минск.

Yanushkevich K. O., Postgraduate at the Department of Micro- and Nanoelectronics, Junior Researcher at the Lab. 4.3, 

Minsk.

ЧубенкоЕ. Б.ChubenkoE. B.

Чубенко Е. Б., канд. техн. наук, доц., доц. каф. микро- и наноэлектроники, вед. науч. сотр. НИЛ 4.3, 

Минск.

Chubenko E. B., Cand. of Sci., Associate Professor, Associate Professor at the Department of Micro- and Nanoelectronics, Senior Researcher at the Lab. 4.3, 

Minsk.

БондаренкоВ. П.BondarenkoV. P.

Бондаренко В. П., канд. техн. наук, доц., зав. НИЛ 4.3,

Минск.

Bondarenko V. P., Cand. of Sci., Associate Professor, Head of the Lab. 4.3, 

Minsk.

Белорусский государственный университет информатики и радиоэлектроники (БГУИР)Belarusian State University of Informatics and Radioelectronics (BSUIR)2024010920242241421Copyright © Греков И.А., Янушкевич К.О., Чубенко Е.Б., Бондаренко В.П., 20242024Греков И.А., Янушкевич К.О., Чубенко Е.Б., Бондаренко В.П.Grekov I.A., Yanushkevich K.O., Chubenko E.B., Bondarenko V.P.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://doklady.bsuir.by/jour/article/view/3951

Комбинированием методов золь-гель и гидротермального осаждения на стеклянных подложках получены тонкопленочные покрытия из оксида цинка с примесью никеля и алюминия. Исследования структуры и состава пленок методами сканирующей электронной микроскопии, энергодисперсионной рентгеновской и рамановской спектроскопии показали, что они состоят из плотноупакованных кристаллитов оксида цинка, легированных примесными атомами никеля и алюминия. На основе полученных пленок изготовлены фотоприемники резистивного типа. Показано, что при облучении светом ультрафиолетового диапазона с длиной волны менее 400 нм удельное сопротивление структуры уменьшается с 190–210 до 7,5–8,0 Ом⋅см. Достигнутое время отклика при нарастании светового импульса – 48 с, тогда как время спада составляет ≈700 с. 

By combining sol-gel and hydrothermal deposition methods on glass substrates, thin-film coatings of zinc oxide doped with nickel and aluminum were obtained. Studies of the structure and composition of the films using scanning electron microscopy, energy-dispersive X-ray and Raman spectroscopy have shown that they consist of close-packed zinc oxide crystallites doped with impurity atoms of nickel and aluminum. Resistive type photodetectors were manufactured based on the films obtained. It has been shown that when irradiated with ultraviolet light with a wavelength less than 400 nm, the resistivity of the structure decreases from 190–210 to 7.5–8.0 Ohm⋅cm. The achieved response time for the rise of the light pulse is 48 s, while the decay time is ≈700 s.

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The authors declare that there are no conflicts of interest present.