bsuirДоклады БГУИРDoklady BGUIR1729-76482708-0382БГУИР10.35596/1729-7648-2024-22-3-14-20bsuir-3926Research ArticleСтатьиФормирование антиотражающих покрытий на основе наноструктурированного алюминия и слоя ксерогеля титаната барияFormation of Anti-Reflection Coatings Based on Nanostructured Aluminum and Barium Titanate Xerogel LayerЛазарукС. К.LazaroukS. K.

Лазарук Сергей Константинович, д-р  физ.-мат.  наук, проф.,  проф. каф. микро- и наноэлектроники, зав. науч.-исслед. лаб.  «Интегрированные  микро-  и наносистемы» (НИЛ   4.6)  НИЧ

220013, г. Минск, ул. П. Бровки, 6

Тел.: +375 17 293-88-69

Lazarouk Serguei Konstantinovich, Dr. of Sci. (Phys. and Math.), Professor, Professor at   the Department of Micro- and Nanoelectronics, Head of the Scientific Research Laboratory “Integrated Micro- and Nanosystems” (Lab.   4.6) of   R&D  Department

220013, Minsk, P. Brovki St., 6

Tel.: +375 17 293-88-69

serg@nano.bsuir.edu.byРайченокТ. Ф.RaichenokT. F.

канд.  физ.-мат.  наук,  вед.  науч. сотр. Центра «Фотоника атомных и молекулярных структур»

Минск

Cand. of Sci., Leading Researcher at   the  Center “Photonics  of  Atomic  and  Molecular Structures”

Minsk

ТомашевичЛ. П.TomashevichL. P.

инж.-электрон. НИЛ 4.6 НИЧ

220013, г. Минск, ул. П. Бровки, 6

Electronics Engineer at  the Lab.  4.6 of R&D Department

220013, Minsk, P. Brovki St., 6

ЛашковскаяЕ. И.LashkovskayaE. I.

инж. науч.-исслед. лаб. «Нано-фотоника» (НИЛ 4.5) НИЧ

220013, г. Минск, ул. П. Бровки, 6

Engineer  at  the  Scientific  Research Laboratory “Nanophotonics” (Lab. 4.5) of  R&D Department

220013, Minsk, P. Brovki St., 6

ПовжикА. А.PovzhikA. A.

нач. сектора СП-110

Минск

Head of Sector SP-110

Minsk

ГапоненкоН. В.GaponenkoN. V.

д-р физ.-мат. наук, проф., проф. каф. микро- и наноэлектроники, зав. НИЛ 4.5 НИЧ

220013, г. Минск, ул. П. Бровки, 6

Dr. of Sci. (Phys. and Math.), Professor, Professor at the Department of Micro- and Nanoelectronics, Head of the Lab. 4.5 of R&D Department

220013, Minsk, P. Brovki St., 6

Белорусский государственный университет информатики и радиоэлектроникиBelarusian State University of Informatics and RadioelectronicsИнститут физики имени Б. И. Степанова Национальной академии наук БеларусиState Scientific Institution B. I. Stepanov Institute of Physics of the National Academy of Sciences of BelarusОАО «Минский НИИ радиоматериалов»OJSC “Minsk Research Institute of Radiomaterials”2024220620242231420Copyright © Лазарук С.К., Райченок Т.Ф., Томашевич Л.П., Лашковская Е.И., Повжик А.А., Гапоненко Н.В., 20242024Лазарук С.К., Райченок Т.Ф., Томашевич Л.П., Лашковская Е.И., Повжик А.А., Гапоненко Н.В.Lazarouk S.K., Raichenok T.F., Tomashevich L.P., Lashkovskaya E.I., Povzhik A.A., Gaponenko N.V.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://doklady.bsuir.by/jour/article/view/3926

Выполнены исследования по формированию антиотражающих покрытий на основе пористого алюминия, полученного методом электрохимического анодного травления, и нанесенного на его   поверхность слоя ксерогеля титаната бария. Толщина пористого алюминия составила от 15 до 100 мкм. Анализ спектров отражения полученных структур показал эффективные антиотражающие свойства сформированных покрытий с коэффициентом зеркального отражения 0,25–2,50 % в диапазоне 200–1100 нм. Применение сформированных покрытий с низким коэффициентом отражения возможно в авиастроении, электронике и энергетике.

The research has been carried out on the formation of anti-reflection coatings based on porous aluminum obtained by electrochemical anodic etching and a layer of barium titanate xerogel deposited on its surface. The  thickness of the porous aluminum ranged from 15 to 100 microns. Analysis of the reflection spectra of the resulting structures showed effective anti-reflection properties of the formed coatings with a specular reflection coefficient of 0.25–2.50 % in the range of 200–1100 nm. The use of formed coatings with a low reflectance coefficient is possible in aircraft manufacturing, electronics and energy.

электрохимическое анодированиепористый алюминийхлорид натрияксерогель титаната барияантиотражающие свойстваelectrochemical anodizingporous aluminumsodium chloridebarium titanate xerogelanti-reflective propertiesРабота выполнена при финансовой поддержке проекта Белорусского республиканского фонда фундаментальных исследований № Х23М-044The work was carried out with the financial support of the project of the Belarusian Republican Foundation for Fundamental Research No Х23М-044.ReferencesIsakov, K. Superhydrophobic Antireflection Coating on Glass Using Grass-Like Alumina and Fluoropolymer / K. Isakov, C. Kauppinen, S. Franssila // ACS Applied Material Interfaces. 2020. Vol. 12, No 44. P. 49957–49962.Is akov K., Kauppinen C., Franssila S. (2020) Superhydrophobic Antireflection Coating on Glass Using Grass-Like Alumina and Fluoropolymer. ACS Applied Material Interfaces . 12 (44), 49957–49962.Soon, H. L. Nanopatterned Polymer Molds Using Anodized Aluminum Templates for Anti-Reflective Coating / H. L. Soon, H. L. Nguen, A. L. Jung // Polymer MDPI. 2021. Vol. 13, No 19. P. 3333–3342.Soon H. L., Nguen H. L., Jung A. L. (2021) Nanopatterned Polymer Molds Using Anodized Aluminum Templates for Anti-Reflective Coating. Polymer MDPI. 13 (19), 3333–3342.Raid, A. I. Preparation and Characterization of Aluminum Oxide Nanoparticles by Laser Ablation in Liquid as Passivating and Anti-Reflection Coating for Silicon Photodiodes / A. I. Raid, A. Z. Shihab, M. K. Rafal // Appl. Nanoscience. 2017. Vol. 7. P. 477–487.Raid A. I., Shihab A. Z., Rafal M. K. (2017) Preparation and Characterization of Aluminum Oxide Nanoparticles by Laser Ablation in Liquid as Passivating and Anti-Reflection Coating for Silicon Photodiodes. Appl. Nanoscience. (7), 477–487.Goldsmith, J. Black Aluminum: A Novel Anti-Reflective Absorbing Coating / J. Goldsmith, V. Vasilyev, J. Vella // United States Air Force Research Laboratory. Wright-Patterson AFB. 2014. P. 69–70.Goldsmith J., Vasilyev V., Vella J. (2014) Black Aluminum: A Novel Anti-Reflective Absorbing Coating. United States Air Force Research Laboratory. Wright-Patterson AFB. 69–70.Kumar, R. H. Anti-Reflective Coatings: A Critical, In-Depth Review / R. H. Kumar, A. Ganesh, N. Sreekumaran // Energy and Environmental Science. 2011. Vol. 4. P. 3779–3804.Kumar R. H., Ganesh A., Sreekumaran N. (2011) Anti-Reflective Coatings: A Critical, In-Depth Review. Energy and Environmental Science. 4, 3779–3804.Enhanced Luminescence of Europium in Sol-Gel Derived BaTiO3/SiO2 Multilayer Cavity Structure / N. V. Gaponenko [et al.] // Optical Materials. 2019. Vol. 96.Gaponenko N. V., Kholov P. A., Raichenok T. F., Prislopski S. Ya. (2019) Enhanced Luminescence of Europium in Sol-Gel Derived BaTiO3/SiO2 Multilayer Cavity Structure. Optical Materials. 96.Lazarouk, S. K. High Field Porous Anodization of Aluminium Films with a Photolithographic Mask / S. K. Lazarouk // Physics, Chemistry and Application of Nanostructures. 2013. P. 355–358.Lazarouk S. K. (2013) High Field Porous Anodization of Aluminium Films with a Photolithographic Mask. Physics, Chemistry and Application of Nanostructures . 355–358.Fabrication of Ideally Ordered Nanoporous Alumina Films and Integrated Alumina Nanotubule Arrays by High-Field Anodization / S. Chu [et al.] // Advanced Materials. 2005. Vol. 17. P. 2115–2119.Chu S., Wada K., Inoue S., Isogai M., Yasumori A. (2005) Fabrication of Ideally Ordered Nanoporous Alumina Films and Integrated Alumina Nanotubule Arrays by High-Field Anodization. Advanced Materials. 17, 2115– 2119.Formation of Alumina Nanotubes and Jet Effect D uring High-Voltage Local Anodization of Aluminum / S. K. Lazarouk [et al.] // Advanced Engineering Materials. 2022. Vol. 24, No 1.Lazarouk S. K., Sasinovich D. A., Dudich V. V., Lazarouk A. S., Borisenko V. E. (2022) Formation of Alumina Nanotubes and Jet Effect during High-Voltage Local Anodization of Aluminum. Advanced Engineering Materials . 24 (1).Visible Electroluminescence from Al-Porous Silicon Reverse Bias Diodes Formed on the Base of Degenerate n-Type Silicon / S. Lazarouk [et al.] // MRS Online Proceedings Library Archive. 1994. Vol. 358. Р. 659–664.Lazarouk S., Bondarenko V., Pershukevich P., La Monica S., Maiello G. (1994) Visible Electroluminescence from Al-Porous Silicon Reverse Bias Diodes Formed on the Base of Degenerate n-Type Silicon. MRS Online Proceedings Library Archive. 358, 659–664.Electroluminescence from Aluminum-Porous Silicon Reverse Bias Schottky Diodes Formed on the Base of Highly Doped n-Type Polysilicon / S. Lazarouk [et al.] // Thin Solid Films. 1996. Vol. 276. P. 296–298.Lazarouk S., Bondarenko V., La Monica S., Maello G., Masini G., Pershukevich P., et al. (1996) Electroluminescence from Aluminum-Porous Silicon Reverse Bias Schottky Diodes Formed on the Base of Highly Doped n-Type Polysilicon. Thin Solid Films . 276, 296–298.Эффективность лавинных светодиодов на основе пористого кремния / C. K. Лазарук [и др.] // Физика и техника полупроводников. 2005. Т. 39, № 1. С. 136–138.Lazarouk S. K., Leshok A. A., Labunov V. A., Borisenko V. E. (2005) Efficiency of Avalanche Light-Emitting Diodes Based on Porous Silicon. Semiconductors. 39 (1), 136–138.Si-Based Optoelectronic Couple / P. Jaguiro [et al.] // Physica E: Low-Dimensional Systems and Nanostructures. 2009. Vol. 41. P. 1094–1096.Jaguiro P., Katsuba P., Lazarouk S., Moore S., Smirnov A. (2009) Si-Based Optoelectronic Couple. Physica E: Low-Dimensional Systems and Nanostructures . 41, 1094–1096.Porous Alumina as Lowe Insulator for Multilevel Metallization / S. Lazarouk [et al.] // Microelectronic Engineering. 2000. Vol. 50, No 1–4. P. 321–327.Lazarouk S., Katsouba S., Leshok A., Demianovich A., Stanovski V., Voitech S., et al. (2000) Porous Alumina as Lowe Insulator for Multilevel Metallization. Microelectronic Engineering. 50 (1–4), 321–327.3D Silicon Photonic Structures Based on Avalanche LED with Interconnections T hrough Optical Interposer / S. K. Lazarouk [et al.] // International Journal of Nanoscience. 2019. Vol. 18, No 3, 4.Lazarouk S. K., Leshok A. A., Kozlova T. A., Dolbik A. V., Le Dinh Vi, Ilkov V. K., et al. (2019) 3D Silicon Photonic Structures Based on Avalanche LED with Interconnections T hrough Optical Interposer. International Journal of Nanoscience . 18 (3, 4).Электролюминесценция наноструктурированного кремния в матрице анодного оксида алюминия / C. K. Лазарук [и др.] // Физика и техника полупроводников. 2007. Т. 41, № 9. С. 1126–1129.Lazarouk S. K., Sasinovich D. A., Katsuba P. S., Labunov V. A., Leshok A. A., Borisenko V. E. (2007) Electroluminescence of Nanostructured Silicon in Anodic Alumina Matrix. Semiconductors. 41 (9), 1126–1129.Anodic Nanoporous Titania for Electro-Optical Devices / S. Lazarouk [et al.] // Japanese Journal of Applied Physics. 2007. Vol. 46.Lazarouk S., Xie Z., Chigrinov V., Kwok H. S. (2007) Anodic Nanoporous Titania for Electro-Optical Devices. Japanese Journal of Applied Physics . 46.Enhancement of Green Terbium-Related Photoluminescence from Highly Doped Microporous Alumina Xerogels in Mesoporous Anodic Alumina / N. V. Gaponenko [et al.] // J. Electrochem. Soc. 2002. Vol. 149.Gaponenko N. V., Molchan I. S., Sergeev O. V., Thompson G. E., Pakes A., Skeldon P., et al. (2002) Enhancement of Green Terbium-Related Photoluminescence from Highly Doped Microporous Alumina Xerogels in Mesoporous Anodic Alumina. J. Electrochem. Soc. 149.

The authors declare that there are no conflicts of interest present.