bsuirДоклады БГУИРDoklady BGUIR1729-76482708-0382БГУИР10.35596/1729-7648-2024-22-2-7-19bsuir-3900Research ArticleЭЛЕКТРОНИКА, РАДИОФИЗИКА, РАДИОТЕХНИКА, ИНФОРМАТИКАELECTRONICS, RADIOPHYSICS, RADIOENGINEERING, INFORMATICSПерспективные оптические и электронные межсоединения элементов интегральных микросхемPerspective Optical and Electronic Interconnects of Integrated Circuit ElementsЛазарукС. К.LazaroukS. K.

Лазарук Сергей Константинович, д-р физ.-мат. наук, проф., проф. каф. микро- и наноэлектроники

220013, г. Минск, ул. П. Бровки, 6

Тел.: +375 17 293-88-69

Lazarouk Sergei Konstantinovich, Dr. of Sci. (Phis. and Math.), Professor, Professor at the Department of Microand Nanoelectronics

220013, Minsk, P. Brovki St., 6

Tel.: +375 17 293-88-69

serg@nano.bsuir.edu.byБондаренкоВ. П.BondarenkoV. P.

канд. техн. наук, доц., зав. науч.-исслед. лаб. «Материалы и структуры наноэлектроники» НИЧ

Cand. of Sci., Associate Professor, Head of the Scientific Research Laboratory “Materials and Structures of Nanoelectronics” of R&D Department

БорисенкоВ. Е.BorisenkoV. E.

д-р физ.-мат. наук, проф., проф. каф. микро- и наноэлектроники

Dr. of Sci. (Phis. and Math.), Professor, Professor at the Department of Microand Nanoelectronics

ГапоненкоН. В.GaponenkoN. V.

д-р физ.-мат. наук, проф., проф. каф. микро- и наноэлектроники

Dr. of Sci. (Phis. and Math.), Professor, Professor at the Department of Microand Nanoelectronics

ГорохГ. Г.GorokhG. G.

канд. техн. наук, зав. науч.-исслед. лаб. «Нанотехнологии» НИЧ

Cand. of Sci., Head of the Scientific Research Laboratory “Nanotechnologies” of R&D Department

ЛешокА. А.LeshokA. A.

канд. физ.-мат. наук, доц., доц. каф. микро- и наноэлектроники

Cand. of Sci., Associate Professor, Associate Professor at the Department of Microand Nanoelectronics

МигасД. Б.MigasD. B.

д-р физ.-мат. наук, доц., зав. каф. микро- и наноэлектроники

Dr. of Sci. (Phis. and Math.), Associate Professor, Head of the Department of Micro- and Nanoelectronics

ЧубенкоЕ. Б.ChubenkoE. B.

канд. техн. наук, доц., доц. кафедры микро- и наноэлектроники

Cand. of Sci., Associate Professor, Associate Professor at the Department of Micro- and Nanoelectronics

Белорусский государственный университет информатики и радиоэлектроникиBelarusian State University of Informatics and Radioelectronics202415042024222719Copyright © Лазарук С.К., Бондаренко В.П., Борисенко В.Е., Гапоненко Н.В., Горох Г.Г., Лешок А.А., Мигас Д.Б., Чубенко Е.Б., 20242024Лазарук С.К., Бондаренко В.П., Борисенко В.Е., Гапоненко Н.В., Горох Г.Г., Лешок А.А., Мигас Д.Б., Чубенко Е.Б.Lazarouk S.K., Bondarenko V.P., Borisenko V.E., Gaponenko N.V., Gorokh G.G., Leshok A.A., Migas D.B., Chubenko E.B.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://doklady.bsuir.by/jour/article/view/3900

Обобщены результаты научных исследований, выполненных в научных подразделениях кафедры микро- и наноэлектроники Белорусского государственного университета информатики и радиоэлектроники в области разработки перспективных оптических и электронных внутричиповых и межчиповых соединений элементов кремниевых интегральных микросхем. Представлены примеры использования наноструктурированных материалов для предложенных, интегрированных с монокристаллическим кремнием, источников и детекторов света (Si), а также волноводов (Al2O3/TiO2). Развита и опробована стратегия применения межчиповых вставок – интерпозеров – для обеспечения оптических и электронных соединений в объемных (2,5D и 3D) сборках кристаллов интегральных микросхем. Приведены результаты поиска новых материалов и структур для источников света, волноводов, оптически прозрачных проводников и защиты от СВЧ-излучения.

The recent results of the investigations performed in the research units of the Department of Micro- and Nanoelectronics of Belarusian State University of Informatics and Radioelectronics in the field of the development of perspective optical and electronic intra-chip and inter-chip interconnections of silicon integrated circuits are summarized. Examples of the use of nanostructured materials for the proposed light sources and detectors (Si) as well as light guides (Al2O3/TiO2) integrated with monocrystalline silicon are presented. The strategy of an application of inter-chip interposers for optical and electronic connections in bulk (2.5D and 3D) packages of integrated circuits was promoted and tested. Novel materials and structures promising for light sources, optically transparent electrical conductors and protectors against microwave electromagnetic radiation are demonstrated.

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The authors declare that there are no conflicts of interest present.