bsuirДоклады БГУИРDoklady BGUIR1729-76482708-0382БГУИР10.35596/1729-7648-2023-21-2-77-85bsuir-3603Research ArticleЭЛЕКТРОНИКА, РАДИОФИЗИКА, РАДИОТЕХНИКА, ИНФОРМАТИКАELECTRONICS, RADIOPHYSICS, RADIOENGINEERING, INFORMATICSКонструкция и характеристики неохлаждаемых болометрических инфракрасных решеток на основе аморфного кремнияDesign and Performance of Amorphous Silicon Based on Uncooled Bolometer-Type Infrared Focal Plane ArraysЧанВан ЧиеуTranVan Trieu

Минск

Postgraduate of Micro- and Nanoelectronics Department

Minsk

СтемпицкийВ. Р.StempitskyV. R.

Минск

Cand. of Sci., Associate Professor, Vice-Rector for Academic Affairs, Adviser of Laboratory “CAD in Micro- and Nanoelectronics” at the Research Department of the

Minsk

ЛовшенкоИ. Ю.LovshenkoI. Yu.

Минск

Lovshenko Ivan Yur’evich, Head of the Research Laboratory “CAD in Micro- and Nanoelectronics” at the Research Department

220013, Minsk, P. Brovki St., 6

Теl.: +375 17 293-88-90

lovshenko@bsuir.byКорсакК. В.KorsakK. V.

Минск

Master’s Student at the Micro- and Nanoelectronics Department

Minsk

ДаоДинь ХаDaoDinh Ha

Ханой

Cand. of Sci.

Hanoi

Белорусский государственный университет информатики и радиоэлектроникиBelarusian State University of Informatics and RadioelectronicsВьетнамский государственный технический университет имени Ле Куй ДонаLe Quy Don University of Science and Technology2023240420232127785Copyright © Чан В., Стемпицкий В.Р., Ловшенко И.Ю., Корсак К.В., Дао Д., 20232023Чан В., Стемпицкий В.Р., Ловшенко И.Ю., Корсак К.В., Дао Д.Tran V., Stempitsky V.R., Lovshenko I.Y., Korsak K.V., Dao D.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://doklady.bsuir.by/jour/article/view/3603

Неохлаждаемые тепловые детекторы болометрического типа, объединенные в матрицу, размещенную в фокальной плоскости, в последнее время активно применяются в инфракрасном или терагерцовом поле обнаружения, поскольку обладают низкой стоимостью и высокой эффективностью обнаружения, совместимы с кремниевой КМОП-технологией, а также работают при комнатной температуре. Характеристики таких детекторов зависят от оптимизации критических параметров, которые определяются геометрической конструкцией, электрическими, оптическими и тепловыми свойствами применяемых материалов. В статье рассмотрены эксплуатационные характеристики пикселей двумерных массивов неохлаждаемых микроболометров на основе термочувствительных пленок аморфного кремния. Поскольку эти массивы значительно уменьшают размер сенсора, они становятся предпочтительным форматом для большинства современных приложений. 

Uncooled bolometric type thermal detectors, combined into a matrix and placed into a focal plane array have the following characteristics: low cost, operation at room temperature, compatibility with the silicon CMOS technology, and high detecting performance; therefore recently it became a hot spot in infrared or terahertz detection field. The performance of uncooled infrared focal plane detector arrays depends on the optimization of critical parameters which are determined by geometrical design and the electrical, optical, and thermal physical properties of the detector materials. We report the study of a fabrication process and characterization of two (2D) dimensional arrays of uncooled microbolometers based on silicon (α-Si) thermo-sensing films. Because these arrays substantially reduce sensor size, they are becoming the preferred format for most modern applications. 

детекторнеохлаждаемый микроболометринфракрасный детектортермодатчикаморфный кремниймоделированиеdetectoruncooled microbolometerinfrared detectorthermo-sensingamorphous siliconmodelingReferencesWood R. A., Han C. J., Kruse P. W. (1992) Integrated Uncooled Infrared Detector Imaging Arrays. Solid-State Sensor and Actuator Workshop, 5th Technical Digest. IEEE. 132–135.Wood R. A., Han C. J., Kruse P. W. (1992) Integrated Uncooled Infrared Detector Imaging Arrays. Solid-State Sensor and Actuator Workshop, 5th Technical Digest. IEEE. 132–135.Takamuro Daisuke, Tomohiro Maegawa, Takaki Sugino (2011) Development of New SOI Diode Structure for Beyond 17 um Pixel Pitch SOI Diode Uncooled IRFPAs. Proceedings of SPIE – the International Society for Optical Engineering. 8012, 80121E.Takamuro Daisuke, Tomohiro Maegawa, Takaki Sugino (2011) Development of New SOI Diode Structure for Beyond 17 um Pixel Pitch SOI Diode Uncooled IRFPAs. Proceedings of SPIE – the International Society for Optical Engineering. 8012, 80121E.Li C., Han C. J., Skidmore G. D., Hess. C. (2010) DRS Uncooled VOx Infrared Detector Development and Production Status. Proc SPIE. 7660, 76600V.Li C., Han C. J., Skidmore G. D., Hess. C. (2010) DRS Uncooled VOx Infrared Detector Development and Production Status. Proc SPIE. 7660, 76600V.Biao Li (2004) Design and Simulation of an Uncooled Double-Cantilever Microbolometer with the Potential for ~ mK NETD. Sensor and Actuators A: Physical. 112 (2), 351–359.Biao Li (2004) Design and Simulation of an Uncooled Double-Cantilever Microbolometer with the Potential for ~ mK NETD. Sensor and Actuators A: Physical. 112 (2), 351–359.Sedky S., Fiorini P., Caymax M., Agnes V., Baert C. (1998) IR Bolometers Made of Polycrystalline Silicon Germanium. Sensors and Actuators A. 66 (1–3), 193–199.Sedky S., Fiorini P., Caymax M., Agnes V., Baert C. (1998) IR Bolometers Made of Polycrystalline Silicon Germanium. Sensors and Actuators A. 66 (1–3), 193–199.Heredia-J. A., Torres-J. A., De la Hidalga-W. F. J., Jaramillo-N. A. (2002) A Boron Doped Amorphous Silicon Thin-Film Bolometer for Long Wavelength Detection. Mat. Res. Soc. Symp. Proc. (744), M5.26.1–M5.26.6.Heredia-J. A., Torres-J. A., De la Hidalga-W. F. J., Jaramillo-N. A. (2002) A Boron Doped Amorphous Silicon Thin-Film Bolometer for Long Wavelength Detection. Mat. Res. Soc. Symp. Proc. (744), M5.26.1–M5.26.6.Kosarev A., Moreno M., Torres A., Zuñiga C. (2008) IR Sensors Based on Silicon–Germanium–Boron Alloys Deposited by Plasma: Fabrication and Characterization. J. of Non-Crystalline Solids. 354 (19–25), 2561–2564.Kosarev A., Moreno M., Torres A., Zuñiga C. (2008) IR Sensors Based on Silicon–Germanium–Boron Alloys Deposited by Plasma: Fabrication and Characterization. J. of Non-Crystalline Solids. 354 (19–25), 2561–2564.Tisse C.-L., Tissot J.-L., Crastes A. (2012) An Information-Theoretic Perspective on the Challenges and Advances in the Race Toward 12 μm Pixel Pitch Megapixel Uncooled Infrared Imaging. Proceedings of the SPIE. 8353.Tisse C.-L., Tissot J.-L., Crastes A. (2012) An Information-Theoretic Perspective on the Challenges and Advances in the Race Toward 12 µm Pixel Pitch Megapixel Uncooled Infrared Imaging. Proceedings of the SPIE. 8353.Hee Yeom Kim, Kyoung Min Kim, Byeong Il Kim et al. (2011) Mechanical Robustness of FPA in a-Si Microbolometer with Fine Pitch. Sensors & Transducers Journal (11), 56–63.Hee Yeom Kim, Kyoung Min Kim, Byeong Il Kim et al. (2011) Mechanical Robustness of FPA in a-Si Microbolometer with Fine Pitch. Sensors & Transducers Journal (11), 56–63.Abbasi S., Shafique A., Ceylan O., Kaynak C. B., Kaynak M., Gurbuz Y. (2018) A Test Platform for the Noise Characterization of SiGe Microbolometer ROICs. IEEE Sensors Journal (18), 6217.Abbasi S., Shafique A., Ceylan O., Kaynak C. B., Kaynak M., Gurbuz Y. (2018) A Test Platform for the Noise Characterization of SiGe Microbolometer ROICs. IEEE Sensors Journal (18), 6217.Mottin E., Bain A., Martin J. L., Ouvrier-Buffet J. L., Bisotto S., Yon J. J., Tissot J. L. (2003) Uncooled Amorphous Silicon Technology Enhancement for 25 μm Pixel Pitch Achievement. Proceedings of the SPIE. 4820, 200–207.Mottin E., Bain A., Martin J. L., Ouvrier-Buffet J. L., Bisotto S., Yon J. J., Tissot J. L. (2003) Uncooled Amorphous Silicon Technology Enhancement for 25 µm Pixel Pitch Achievement. Proceedings of the SPIE. 4820, 200–207.Murphy D., Ray M., Wyles J., Asbrock J., Hewitt C., Wyles R., Gordon E., Sessler T., Kennedy A., Baur S., Van Lue D. (2004) Performance Improvements for VOx Microbolometer FPAs. Proceedings of the SPIE. 5406, 531–540.Murphy D., Ray M., Wyles J., Asbrock J., Hewitt C., Wyles R., Gordon E., Sessler T., Kennedy A., Baur S., Van Lue D. (2004) Performance Improvements for VOx Microbolometer FPAs. Proceedings of the SPIE. 5406, 531–540.

The authors declare that there are no conflicts of interest present.