<?xml version="1.0" encoding="UTF-8"?>
<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Publishing DTD v1.3 20210610//EN" "JATS-journalpublishing1-3.dtd">
<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">bsuir</journal-id><journal-title-group><journal-title xml:lang="ru">Доклады БГУИР</journal-title><trans-title-group xml:lang="en"><trans-title>Doklady BGUIR</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">1729-7648</issn><issn pub-type="epub">2708-0382</issn><publisher><publisher-name>БГУИР</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.35596/1729-7648-2020-18-3-63-71</article-id><article-id custom-type="elpub" pub-id-type="custom">bsuir-2670</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>ЭЛЕКТРОНИКА, РАДИОФИЗИКА, РАДИОТЕХНИКА, ИНФОРМАТИКА</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="en"><subject>ELECTRONICS, RADIOPHYSICS, RADIOENGINEERING, INFORMATICS</subject></subj-group></article-categories><title-group><article-title>Лавинные светодиоды на основе наноструктурированного кремния для оптических межсоединений</article-title><trans-title-group xml:lang="en"><trans-title>Avalanche leds based on nanostructured silicon for optical interconnections</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Ви</surname><given-names>Ле Динь</given-names></name><name name-style="western" xml:lang="en"><surname>Vi</surname><given-names>Le Dinh</given-names></name></name-alternatives><bio xml:lang="ru"><p>Аспирант кафедры микро- и наноэлектроники.</p><p>220013, Минск, ул. П. Бровки, 6.</p></bio><bio xml:lang="en"><p>Le Dinh Vi - PG student of Micro- and nanoelectronics Department of Belarusian State University of Informatics and Radioelectronics.</p><p>220013, Minsk, P. Brovka str., 6.</p></bio><email xlink:type="simple">levi.ntv@gmail.com</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Лешок</surname><given-names>А. А.</given-names></name><name name-style="western" xml:lang="en"><surname>Leshok</surname><given-names>A. A.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Кандидат физико-математических наук, начальник Центра 4.11 НИЧ.</p><p>220013, Минск, ул. П. Бровки, 6.</p></bio><bio xml:lang="en"><p>Andrei A. Leshok - PhD, Head of Center 4.11 of Belarussian State University of Informatics and Radioelectronics.</p><p>220013, Minsk, P. Brovka str., 6.</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Долбик</surname><given-names>А. В.</given-names></name><name name-style="western" xml:lang="en"><surname>Dolbik</surname><given-names>A. V.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Научный сотрудник НИЛ 4.12 НИЧ.</p><p>220013, Минск, ул. П. Бровки, 6.</p></bio><bio xml:lang="en"><p>Alexander V. Dolbik - Research Worker of laboratory 4.12 of R&amp;D Department of Belarusian State University of Informatics and Radioelectronics.</p><p>220013, Minsk, P. Brovka str., 6.</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Перко</surname><given-names>С. Л.</given-names></name><name name-style="western" xml:lang="en"><surname>Perko</surname><given-names>S. L.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Аспирант кафедры микро- и наноэлектроники.</p><p>220013, Минск, ул. П. Бровки, 6.</p></bio><bio xml:lang="en"><p>Sergey L. Perko - PG student of Micro- and nanoelectronics Department of Belarusian State University of Informatics and Radioelectronics.</p><p>220013, Minsk, P. Brovka str., 6.</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Лазарук</surname><given-names>С. К.</given-names></name><name name-style="western" xml:lang="en"><surname>Lazarouk</surname><given-names>S. K.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Доктор физико-математических наук, заведующий НИЛ 4.12 НИЧ.</p><p>220013, Минск, ул. П. Бровки, 6.</p></bio><bio xml:lang="en"><p>Sergey K. Lazarouk - DSci., Head of laboratory 4.12 of R&amp;D Department of Belarusian State University of Informatics and Radioelectronics.</p><p>220013, Minsk, P. Brovka str., 6.</p></bio><xref ref-type="aff" rid="aff-1"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru"><institution>Белорусский государственный университет информатики и радиоэлектроники</institution></aff><aff xml:lang="en"><institution>Belarusian State University of Informatics and Radioelectronics</institution></aff></aff-alternatives><pub-date pub-type="collection"><year>2020</year></pub-date><pub-date pub-type="epub"><day>16</day><month>05</month><year>2020</year></pub-date><volume>18</volume><issue>3</issue><fpage>63</fpage><lpage>71</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Ви Л.Д., Лешок А.А., Долбик А.В., Перко С.Л., Лазарук С.К., 2020</copyright-statement><copyright-year>2020</copyright-year><copyright-holder xml:lang="ru">Ви Л.Д., Лешок А.А., Долбик А.В., Перко С.Л., Лазарук С.К.</copyright-holder><copyright-holder xml:lang="en">Vi L.D., Leshok A.A., Dolbik A.V., Perko S.L., Lazarouk S.K.</copyright-holder><license xml:lang="ru" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>Данная работа распространяется под лицензией Creative Commons Attribution 4.0.</license-p></license><license xml:lang="en" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://doklady.bsuir.by/jour/article/view/2670">https://doklady.bsuir.by/jour/article/view/2670</self-uri><abstract><p>В работе проведен анализ параметров кремниевых лавинных светодиодов и их использования для электронно-оптических систем передачи сигналов. Показаны преимущества данных приборов, среди которых следует выделить высокое быстродействие и совместимость с кремниевой технологией. Изготовлены экспериментальные образцы лавинных светодиодов на основе наноструктурированного кремния и исследованы их структурные и оптические характеристики. Представлены результаты управления спектром электролюминесценции лавинных светодиодов за счет выбора технологических режимов формирования наноструктурированного кремния. Установлено, что температура подложки в процессе осаждения поверхностной нанокомпозитной пленки алюминий + кремний влияет на размеры формирующихся кремниевых наночастиц, определяющих спектральные характеристики лавинных светодиодов. Это позволяет смещать максимум спектра их излучения в более коротковолновую область видимого диапазона за счет формирования кремниевых наночастиц меньших размеров. Разработана система оптических межсоединений, состоящая из лавинных светодиодов на основе наноструктурированного кремния и микроканальной кремниевой пластины, используемой для передачи светового сигнала. Проведено исследование различных режимов функционирования разработанной оптоэлектронной системы и достигнуто увеличение эффективности оптопары на основе лавинных светодиодов до 0,2 % за счет импульсного режима функционирования. Показано, что эффективность оптопары увеличивается при увеличении тока светодиода, и именно импульсный режим его работы характеризуется максимальным значением тока, что обусловлено более эффективным отводом джоулевого тепла в промежутках между импульсами, обеспечивающим стабильную работу всей системы. Полученные результаты открывают новые возможности для развития оптических межсоединений между кремниевыми чипами и кремниевой оптоэлектроники в целом.</p></abstract><trans-abstract xml:lang="en"><p>The paper analyzes the parameters of silicon avalanche LEDs and their use for electron-optical signal transmission systems. The advantages of silicon avalanche LEDs are shown, among which high speed and compatibility with silicon technology should be highlighted. Experimental avalanche LEDs based on nanostructured silicon were fabricated and studied. The results of controlling the electroluminescence spectrum of avalanche LEDs due to the choice of production conditions to form nanostructured silicon are presented. It was found that the temperature of the substrate during the deposition of the surface nanocomposite aluminum + silicon film affected the size of the formed silicon nanoparticles determining the spectral characteristics of avalanche LEDs. This allows shifting the maximum of their emission spectrum to a shorter wavelength region of the visible range due to the forming of smaller silicon nanoparticles. The authors have developed an optical interconnection system consisting of avalanche LEDs based on nanostructured silicon and a microchannel silicon wafer used to transmit a light signal. The study of various operating modes of the developed optoelectronic system was performed and an increase in the efficiency of optocouple based on avalanche LEDs to 0.2% due to the pulsed operating mode was achieved. It is shown that the efficiency of the optocouple increases with LED current and it is the pulsed mode of its operation that is characterized by the maximum current, which is due to more efficient removal of Joule heat in the intervals between pulses, ensuring stable operation of the entire system. The results obtained open up new opportunities for the development of optical interconnections between silicon chips and silicon optoelectronics in general.</p></trans-abstract><kwd-group xml:lang="ru"><kwd>лавинные светодиоды</kwd><kwd>наноструктурированный кремний</kwd><kwd>электролюминесценция</kwd><kwd>оптопара</kwd><kwd>оптические межсоединения</kwd></kwd-group><kwd-group xml:lang="en"><kwd>avalanche LEDs</kwd><kwd>nanostructured silicon</kwd><kwd>electroluminescence</kwd><kwd>optocouple</kwd><kwd>optical interconnects</kwd></kwd-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Newman R. Visible light from a silicon p-n junction. Physical Review. 1955;100(2):700-703. DOI: 10.1103/PhysRev.100.700.</mixed-citation><mixed-citation xml:lang="en">Newman R. Visible light from a silicon p-n junction. Physical Review. 1955;100(2):700-703. DOI: 10.1103/PhysRev.100.700.</mixed-citation></citation-alternatives></ref><ref id="cit2"><label>2</label><citation-alternatives><mixed-citation xml:lang="ru">Chynoweth A., McKay K. Photon emission from avalanche breakdown in silicon. Physical Review. 1956;102(2):369-376. DOI: 10.1103/PhysRev.102.369.</mixed-citation><mixed-citation xml:lang="en">Chynoweth A., McKay K. Photon emission from avalanche breakdown in silicon. Physical Review. 1956;102(2):369-376. DOI: 10.1103/PhysRev.102.369.</mixed-citation></citation-alternatives></ref><ref id="cit3"><label>3</label><citation-alternatives><mixed-citation xml:lang="ru">Richter A., Steiner P., Kozlowski F., Lang W. Current-induced light emission from a porous silicon device. IEEE Electron Device Letters. 1991;12(12):691-692. DOI: 10.1109/55.116957.</mixed-citation><mixed-citation xml:lang="en">Richter A., Steiner P., Kozlowski F., Lang W. Current-induced light emission from a porous silicon device. IEEE Electron Device Letters. 1991;12(12):691-692. DOI: 10.1109/55.116957.</mixed-citation></citation-alternatives></ref><ref id="cit4"><label>4</label><citation-alternatives><mixed-citation xml:lang="ru">Lazarouk S., Jaguiro P., Katsouba S., Masini G., La Monica S., Maiello G., Ferrari A. Stable electroluminescence from reverse biased n-type porous silicon-aluminum Schottky junction device. Applied Physics Letters. 1996; 68(15): 2108-2110. DOI: 10.1063/1.115892.</mixed-citation><mixed-citation xml:lang="en">Lazarouk S., Jaguiro P., Katsouba S., Masini G., La Monica S., Maiello G., Ferrari A. Stable electroluminescence from reverse biased n-type porous silicon-aluminum Schottky junction device. Applied Physics Letters. 1996; 68(15): 2108-2110. DOI: 10.1063/1.115892.</mixed-citation></citation-alternatives></ref><ref id="cit5"><label>5</label><citation-alternatives><mixed-citation xml:lang="ru">Lazarouk S., Baturevich A. [Perspectives of avalanche light emitting diodes based on porous silicon for optical interconnects]. Izvestija Belorusskoj inzhenernoj akademii = Belarus Engineering Academy Letters. 1999;7(01&amp;02):147-149. (In Russ.)</mixed-citation><mixed-citation xml:lang="en">Lazarouk S., Baturevich A. [Perspectives of avalanche light emitting diodes based on porous silicon for optical interconnects]. Izvestija Belorusskoj inzhenernoj akademii = Belarus Engineering Academy Letters. 1999;7(01&amp;02):147-149. (In Russ.)</mixed-citation></citation-alternatives></ref><ref id="cit6"><label>6</label><citation-alternatives><mixed-citation xml:lang="ru">Lazarouk S., Jaguiro P., Leshok A., Borisenko V. Avalanche porous silicon light emitting diodes for optical intra-chip interconnects. Microelectronics, Microsystems and Nanotechnology. World Scientific. 2001;MMN2000:41-44. DOI: 10.1142/9789812810861_0009.</mixed-citation><mixed-citation xml:lang="en">Lazarouk S., Jaguiro P., Leshok A., Borisenko V. Avalanche porous silicon light emitting diodes for optical intra-chip interconnects. Microelectronics, Microsystems and Nanotechnology. World Scientific. 2001;MMN2000:41-44. DOI: 10.1142/9789812810861_0009.</mixed-citation></citation-alternatives></ref><ref id="cit7"><label>7</label><citation-alternatives><mixed-citation xml:lang="ru">Lazarouk S., Leshok A., Labunov V., Borisenko V. Efficiency of avalanche light-emitting diodes based on porous silicon. Semiconductors. 2005;39(1):136-138. DOI: 10.1134/1.1852663.</mixed-citation><mixed-citation xml:lang="en">Lazarouk S., Leshok A., Labunov V., Borisenko V. Efficiency of avalanche light-emitting diodes based on porous silicon. Semiconductors. 2005;39(1):136-138. DOI: 10.1134/1.1852663.</mixed-citation></citation-alternatives></ref><ref id="cit8"><label>8</label><citation-alternatives><mixed-citation xml:lang="ru">Kuznetsov V., Andrienko I., Haneman D. High efficiency blue-green electroluminescence and scanning tunneling microscopy studies of porous silicon. Applied Physics Letters. 1998;72(25):3323-3325. DOI: 10.1063/1.121592.</mixed-citation><mixed-citation xml:lang="en">Kuznetsov V., Andrienko I., Haneman D. High efficiency blue-green electroluminescence and scanning tunneling microscopy studies of porous silicon. Applied Physics Letters. 1998;72(25):3323-3325. DOI: 10.1063/1.121592.</mixed-citation></citation-alternatives></ref><ref id="cit9"><label>9</label><citation-alternatives><mixed-citation xml:lang="ru">Gelloz B., Nakagawa T., Koshida N. Enhancement of the quantum efficiency and stability of electroluminescence from porous silicon by anodic passivation. Applied Physics Letters. 1998;73(14):2021-2023. DOI: 10.1063/1.122355.</mixed-citation><mixed-citation xml:lang="en">Gelloz B., Nakagawa T., Koshida N. Enhancement of the quantum efficiency and stability of electroluminescence from porous silicon by anodic passivation. Applied Physics Letters. 1998;73(14):2021-2023. DOI: 10.1063/1.122355.</mixed-citation></citation-alternatives></ref><ref id="cit10"><label>10</label><citation-alternatives><mixed-citation xml:lang="ru">Karsenty A., Sa'ar A., Ben-Yosef N., Shappir J. Enhanced electroluminescence in silicon-on-insulator metal -oxide - semiconductor transistors with thin silicon layer. Applied Physics Letters. 2003;82(26):4830-4832. DOI: 10.1063/1.1587877.</mixed-citation><mixed-citation xml:lang="en">Karsenty A., Sa'ar A., Ben-Yosef N., Shappir J. Enhanced electroluminescence in silicon-on-insulator metal -oxide - semiconductor transistors with thin silicon layer. Applied Physics Letters. 2003;82(26):4830-4832. DOI: 10.1063/1.1587877.</mixed-citation></citation-alternatives></ref><ref id="cit11"><label>11</label><citation-alternatives><mixed-citation xml:lang="ru">Chatterjee A., Bhuva B., Schrimpf R. High-speed light modulation in avalanche breakdown mode for Si diodes. IEEE Electron Device Letters. 2004;25(9):628-630. DOI: 10.1109/LED.2004.834247.</mixed-citation><mixed-citation xml:lang="en">Chatterjee A., Bhuva B., Schrimpf R. High-speed light modulation in avalanche breakdown mode for Si diodes. IEEE Electron Device Letters. 2004;25(9):628-630. DOI: 10.1109/LED.2004.834247.</mixed-citation></citation-alternatives></ref><ref id="cit12"><label>12</label><citation-alternatives><mixed-citation xml:lang="ru">Snyman L.W., Aharoni H., Du Plessis M. A dependency of quantum efficiency of silicon CMOS n/sup+/pp/sup+/LEDs on current density. IEEE Photonics Technology Letters. 2005;17(10):2041-2043. DOI: 10.1109/LPT.2005.856448.</mixed-citation><mixed-citation xml:lang="en">Snyman L.W., Aharoni H., Du Plessis M. A dependency of quantum efficiency of silicon CMOS n/sup+/pp/sup+/LEDs on current density. IEEE Photonics Technology Letters. 2005;17(10):2041-2043. DOI: 10.1109/LPT.2005.856448.</mixed-citation></citation-alternatives></ref><ref id="cit13"><label>13</label><citation-alternatives><mixed-citation xml:lang="ru">Snyman L.W., Du Plessis M., Aharoni H. Injection-avalanche-based n+ pn silicon complementary metal-oxide-semiconductor light-emitting device (450-750 nm) with 2-order-of-magnitude increase in light emission intensity. Japanese journal of Applied physics. 2007;46(4B):2474-2480. DOI: 10.1143/JJAP.46.2474.</mixed-citation><mixed-citation xml:lang="en">Snyman L.W., Du Plessis M., Aharoni H. Injection-avalanche-based n+ pn silicon complementary metal-oxide-semiconductor light-emitting device (450-750 nm) with 2-order-of-magnitude increase in light emission intensity. Japanese journal of Applied physics. 2007;46(4B):2474-2480. DOI: 10.1143/JJAP.46.2474.</mixed-citation></citation-alternatives></ref><ref id="cit14"><label>14</label><citation-alternatives><mixed-citation xml:lang="ru">Du Plessis M., Venter P.J., Bellotti E. Spectral characteristics of hot electron electroluminescence in silicon avalanching junctions. IEEE Journal of Quantum Electronics. 2013;49(7):570-577. DOI: 10.1109/JQE.2013.2260724.</mixed-citation><mixed-citation xml:lang="en">Du Plessis M., Venter P.J., Bellotti E. Spectral characteristics of hot electron electroluminescence in silicon avalanching junctions. IEEE Journal of Quantum Electronics. 2013;49(7):570-577. DOI: 10.1109/JQE.2013.2260724.</mixed-citation></citation-alternatives></ref><ref id="cit15"><label>15</label><citation-alternatives><mixed-citation xml:lang="ru">Kulakci M., Turan R. Improvement of light emission from Tb-doped Si-based MOS-LED using excess Si in the oxide layer. Journal of Luminescence. 2013;137:37-42. DOI: 10.1016/j.jlumin.2012.11.005.</mixed-citation><mixed-citation xml:lang="en">Kulakci M., Turan R. Improvement of light emission from Tb-doped Si-based MOS-LED using excess Si in the oxide layer. Journal of Luminescence. 2013;137:37-42. DOI: 10.1016/j.jlumin.2012.11.005.</mixed-citation></citation-alternatives></ref><ref id="cit16"><label>16</label><citation-alternatives><mixed-citation xml:lang="ru">Ogudo K.A., Snyman L.W., Polleux J.-L., Viana C., Tegegne Z., Schmieder D. Towards 10-40 GHz on-chip micro-optical links with all integrated Si Av LED optical sources, Si N based waveguides and Si-Ge detector technology. Proc. SPIE 8991, Optical Interconnects XIV. 2014;8991:899108(1-16). DOI: 10.1117/12.2038079.</mixed-citation><mixed-citation xml:lang="en">Ogudo K.A., Snyman L.W., Polleux J.-L., Viana C., Tegegne Z., Schmieder D. Towards 10-40 GHz on-chip micro-optical links with all integrated Si Av LED optical sources, Si N based waveguides and Si-Ge detector technology. Proc. SPIE 8991, Optical Interconnects XIV. 2014;8991:899108(1-16). DOI: 10.1117/12.2038079.</mixed-citation></citation-alternatives></ref><ref id="cit17"><label>17</label><citation-alternatives><mixed-citation xml:lang="ru">Xu K. Electro-optical modulation processes in Si-PMOSFET LEDs operating in the avalanche light emission mode. IEEE Transactions on Electron Devices. 2014;61(6):2085-2092. DOI: 10.1109/TED.2014.2318277.</mixed-citation><mixed-citation xml:lang="en">Xu K. Electro-optical modulation processes in Si-PMOSFET LEDs operating in the avalanche light emission mode. IEEE Transactions on Electron Devices. 2014;61(6):2085-2092. DOI: 10.1109/TED.2014.2318277.</mixed-citation></citation-alternatives></ref><ref id="cit18"><label>18</label><citation-alternatives><mixed-citation xml:lang="ru">Xu K. Silicon MOS optoelectronic micro-nano structure based on reverse-biased PN junction. Physica Status Solidi (a). 2019;216(7):1800868(1-9). DOI: 10.1002/pssa.201800868.</mixed-citation><mixed-citation xml:lang="en">Xu K. Silicon MOS optoelectronic micro-nano structure based on reverse-biased PN junction. Physica Status Solidi (a). 2019;216(7):1800868(1-9). DOI: 10.1002/pssa.201800868.</mixed-citation></citation-alternatives></ref><ref id="cit19"><label>19</label><citation-alternatives><mixed-citation xml:lang="ru">Dutta S., Steeneken P.G., Agarwal V., Schmitz J., Annema A.-J., Hueting R.J. The avalanche-mode superjunction LED. IEEE Transactions on Electron Devices. 2017;64(4):1612-1618. DOI: 10.1109/TED.2017.2669645.</mixed-citation><mixed-citation xml:lang="en">Dutta S., Steeneken P.G., Agarwal V., Schmitz J., Annema A.-J., Hueting R.J. The avalanche-mode superjunction LED. IEEE Transactions on Electron Devices. 2017;64(4):1612-1618. DOI: 10.1109/TED.2017.2669645.</mixed-citation></citation-alternatives></ref><ref id="cit20"><label>20</label><citation-alternatives><mixed-citation xml:lang="ru">Okhai T.A., Snyman L.W., Polleux J.-L. Wavelength dispersion characteristics of integrated silicon avalanche LEDs: potential applications in futuristic on-chip micro-and nano-biosensors. Proc. SPIE 10036, Fourth Conference on Sensors, MEMS, and Electro-Optic Systems. 2017;10036:1003604(1-22). DOI: 10.1117/12.2264200.</mixed-citation><mixed-citation xml:lang="en">Okhai T.A., Snyman L.W., Polleux J.-L. Wavelength dispersion characteristics of integrated silicon avalanche LEDs: potential applications in futuristic on-chip micro-and nano-biosensors. Proc. SPIE 10036, Fourth Conference on Sensors, MEMS, and Electro-Optic Systems. 2017;10036:1003604(1-22). DOI: 10.1117/12.2264200.</mixed-citation></citation-alternatives></ref><ref id="cit21"><label>21</label><citation-alternatives><mixed-citation xml:lang="ru">Agarwal V., Dutta S., Annema A., Hueting R., Schmitz J., Lee M., Charbon E., Nauta B. Optocoupling in CMOS. IEEE International Electron Devices Meeting (IEDM).2018(IEMD18):739-742. DOI: 10.1109/IEDM.2018.8614523.</mixed-citation><mixed-citation xml:lang="en">Agarwal V., Dutta S., Annema A., Hueting R., Schmitz J., Lee M., Charbon E., Nauta B. Optocoupling in CMOS. IEEE International Electron Devices Meeting (IEDM).2018(IEMD18):739-742. DOI: 10.1109/IEDM.2018.8614523.</mixed-citation></citation-alternatives></ref><ref id="cit22"><label>22</label><citation-alternatives><mixed-citation xml:lang="ru">Xu K., Chen Y., Okhai T.A., Snyman L.W. Micro optical sensors based on avalanching silicon light-emitting devices monolithically integrated on chips. Optical Materials Express. 2019;9(10):3985-3997. DOI: 10.1364/OME.9.003985.</mixed-citation><mixed-citation xml:lang="en">Xu K., Chen Y., Okhai T.A., Snyman L.W. Micro optical sensors based on avalanching silicon light-emitting devices monolithically integrated on chips. Optical Materials Express. 2019;9(10):3985-3997. DOI: 10.1364/OME.9.003985.</mixed-citation></citation-alternatives></ref><ref id="cit23"><label>23</label><citation-alternatives><mixed-citation xml:lang="ru">Krakers M., Kneevic T., Nanver L. Reverse breakdown and light-emission patterns studied in Si PureB SPADs. 42nd International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO). 2019;MIPRO2019:30-35. DOI: 10.23919/MIPRO.2019.8757007.</mixed-citation><mixed-citation xml:lang="en">Krakers M., Kneevic T., Nanver L. Reverse breakdown and light-emission patterns studied in Si PureB SPADs. 42nd International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO). 2019;MIPRO2019:30-35. DOI: 10.23919/MIPRO.2019.8757007.</mixed-citation></citation-alternatives></ref><ref id="cit24"><label>24</label><citation-alternatives><mixed-citation xml:lang="ru">Lazarouk S., Leshok A., Kozlova T., Dolbik A., Le Dinh V., Ilkov V., Labunov V. 3D Silicon Photonic Structures Based on Avalanche LED with Interconnections through Optical Interposer. International Journal of Nanoscience. 2019;18(3&amp;4):1940091(1-5). DOI: 10.1142/S0219581X1940091X.</mixed-citation><mixed-citation xml:lang="en">Lazarouk S., Leshok A., Kozlova T., Dolbik A., Le Dinh V., Ilkov V., Labunov V. 3D Silicon Photonic Structures Based on Avalanche LED with Interconnections through Optical Interposer. International Journal of Nanoscience. 2019;18(3&amp;4):1940091(1-5). DOI: 10.1142/S0219581X1940091X.</mixed-citation></citation-alternatives></ref><ref id="cit25"><label>25</label><citation-alternatives><mixed-citation xml:lang="ru">Lazarouk S., Sasinovich D., Katsuba P., Labunov V., Leshok A., Borisenko V. Electroluminescence from nanostructured silicon embedded in anodic alumina. Semiconductors. 2007;41(9):1109-1112. DOI: 10.1134/S1063782607090163.</mixed-citation><mixed-citation xml:lang="en">Lazarouk S., Sasinovich D., Katsuba P., Labunov V., Leshok A., Borisenko V. Electroluminescence from nanostructured silicon embedded in anodic alumina. Semiconductors. 2007;41(9):1109-1112. DOI: 10.1134/S1063782607090163.</mixed-citation></citation-alternatives></ref></ref-list><fn-group><fn fn-type="conflict"><p>The authors declare that there are no conflicts of interest present.</p></fn></fn-group></back></article>
